FLUID MECHANISM, SUPPORT MEMBER CONSTITUTING FLUID MECHANISM AND FLUID CONTROL SYSTEM

• US 20160048136A1
• Filed: 10/28/2015
• Published: 02/18/2016
• Est. Priority Date: 10/05/2011
• Status: Active Grant

• Current Assignee: Horiba STEC, Co., Ltd. (Horiba Limited)
• Original Assignee: Horiba STEC, Co., Ltd. (Horiba Limited)
• Inventors: Yasuda, Tadahiro
• Granted Patent: US 9,766,634 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: F16K 27/003 Housing formed from a plurality of the same valve elements
• CPC Class Codes: G01F 5/00 Measuring a proportion of the volume flow
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/87249 Multiple inlet with multiple outlet
• CPC Class Codes: Y10T 137/87885 Sectional block structure

Abstract

This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long.

Claims

1. A fluid control system comprising:

a primary flow channel that extends in parallel to an imaginary plane,

a plurality of secondary flow channels that intersect with the primary flow channel viewed from a direction of the imaginary plane and that are so configured to be connected to the primary flow channel at the intersect points and into which a part of a fluid flowing in the primary flow channel flows, and

a fluid resistive element that is arranged in an installation area set at least at one of the intersect points and that determines a ratio of the fluid flow rate flowing from the primary flow channel into the secondary flow channel.

2. The fluid control system described in claim 1, further comprising:

a fluid supply device connected to each end of the primary flow channel so as to flow the fluid into the primary flow channel from each end respectively.

3. The fluid control system described in claim 1, further comprising a plurality of primary flow channels, and which is characterized in that multiple primary flow channels and multiple secondary flow channels are configured in a latticed state viewed from the direction of the imaginary plane.

4. The fluid control system described in claim 1, wherein

the installation area is arranged in the primary flow channel.

5. The fluid control system described in claim 1, wherein

inside of the fluid resistive element are formed a large channel where substantially no resistance is generated and a pair of small channels that are bifurcated from the large channel and where resistance is generated, the large channel of the fluid resistive element being arranged in the installation area in communication with the secondary flow channel, and each of the small channels being in communication with the upstream side and the downstream side in the installation area of the primary flow channel respectively.