Method for Producing a Thin-Film Semiconductor Body and Thin-Film Semiconductor Body
First Claim
1. A thin-film semiconductor body, which is suitable for emitting electromagnetic radiation from a radiation exit face, comprising:
- a semiconductor layer sequence with an active zone, which is configured to generate electromagnetic radiation, andepitaxially formed pyramid-shaped outcoupling structures arranged on the radiation exit face.
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Abstract
A method for producing a thin-film semiconductor body is provided. A growth substrate is provided. A semiconductor layer with funnel-shaped and/or inverted pyramid-shaped recesses is epitaxially grown onto the growth substrate. The recesses are filled with a semiconductor material in such a way that pyramid-shaped outcoupling structures arise. A semiconductor layer sequence with an active layer is applied on the outcoupled structures. The active layer is suitable for generating electromagnetic radiation. A carrier is applied onto the semiconductor layer sequence. At least the semiconductor layer with the funnel-shaped and/or inverted pyramid-shaped recesses is detached, such that the pyramid-shaped outcoupling structures are configured as projections on a radiation exit face of the thin-film semiconductor.
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Citations
9 Claims
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1. A thin-film semiconductor body, which is suitable for emitting electromagnetic radiation from a radiation exit face, comprising:
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a semiconductor layer sequence with an active zone, which is configured to generate electromagnetic radiation, and epitaxially formed pyramid-shaped outcoupling structures arranged on the radiation exit face. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification