TECHNIQUES FOR FABRICATING DIAMOND NANOSTRUCTURES

• US 20160052789A1
• Filed: 09/01/2015
• Published: 02/25/2016
• Est. Priority Date: 03/06/2013
• Status: Abandoned Application

• Current Assignee: Trustees Of Columbia University In The City Of New York (Columbia University)
• Original Assignee: Trustees Of Columbia University In The City Of New York (Columbia University)
• Inventors: Gaathon, Ophir, Englund, Dirk R., Hodges, Jonathan, Li, Luozhou, Trushem, Matthew
• Application Number:
  US14/841,922
• Publication Number:
  US 20160052789A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: C01B 32/28 After-treatment, e.g. purification, irradiation, separation or recovery
• CPC Class Codes: C09K 11/65 containing carbon in organic compounds C09K11/06
• CPC Class Codes: H01J 2237/3341 Reactive etching
• CPC Class Codes: H01J 2237/339 Synthesising components
• CPC Class Codes: H01J 37/32651 Shields, e.g. dark space shields, Faraday shields
• CPC Class Codes: H01J 37/32788 for extracting the material from the process chamber

Abstract

Techniques for fabricating diamond nanostructures including application of a self-assembled hard mask to a surface of a diamond substrate to define a pattern of masked regions having a predetermined diameter surrounded by an exposed portion. The exposed portion can be vertically etched to a predetermined depth using inductively coupled plasma to form a plurality of nanoposts corresponding to the masked regions. The nanoposts can be harvested to obtain a nanostructure with a diameter corresponding to the predetermined diameter and a length corresponding to the predetermined depth.

Claims

1. A method for fabricating diamond nanostructures, comprising:

applying a hard mask to a surface of a diamond substrate to define thereon a pattern of masked regions having a predetermined diameter surrounded by at least one exposed portion;

vertically etching the exposed portion of the diamond structure to at least the predetermined depth to thereby form a plurality of nanoposts corresponding to the masked regions; and

harvesting at least one nanopost from the diamond substrate, thereby obtaining a nanostructure having a diameter corresponding to the predetermined diameter, and a length corresponding to the predetermined depth.

2. The method of claim 1, wherein the diamond substrate includes a diamond substrate selected from the group consisting of high-purity diamond, low purity diamond, single crystal diamond, or multi-crystal diamond.

3. The method of claim 1, wherein applying the hard mask includes applying a high-density monolayer of self-assembled dielectric or metallic nanoparticles.

4. The method of claim 1, wherein applying the hard mask includes heating a thin, evaporated layer of gold on the surface of the diamond substrate to thereby form a plurality of gold droplets, wherein the plurality of gold droplets correspond to the masked regions.

5. The method of claim 1, wherein applying the hard mask includes damaging the surface of the diamond substrate to create variations in height of the surface, and wherein the masked regions correspond to the variations in height.

6. The method of claim 1, wherein vertically etching the exposed portion includes using inductively coupled plasma or reactive ion etching.

7. The method of claim 1, wherein the predetermined diameter of the masked regions is between approximately 25 nm and 225 nm, and wherein the predetermined depth is between approximately 50 nm and 1 mm.

8. The method of claim 1, wherein the predetermined diameter of the masked regions is approximately 50 nm and the predetermined depth is approximately 80 nm.

9. The method of claim 1, wherein the predetermined diameter of the masked regions is approximately 200 nm and the predetermined depth is approximately 400 nm.

10. The method of claim 1, wherein harvesting the at least one nanopost includes one or more of mechanical shaving or applying sound energy to remove the nanoposts from the diamond substrate.

11. The method of claim 1, further comprising repeating applying the hard mask, vertically etching the exposed portion of the diamond substrate, and harvesting the at least one nanopost to thereby perform layer by layer fabrication of diamond nanostructures from the diamond substrate.

12. The method of claim 1, further comprising:

implanting nitrogen atoms into the diamond nanostructure;

annealing the diamond nanostructure at approximately 850°

C. to mobilize vacancies in the diamond nanostructure crystal and thereby form nitrogen vacancy centers; and

oxygenating the surface of the diamond nanostructure by oxidation at approximately 475°

C. to change the surface termination of the diamond surface and stabilize at least some of the negatively charged nitrogen vacancy centers.

13. A system for fabricating diamond nanostructures using a diamond substrate, comprising:

a masking device, adapted for operational coupling to the diamond substrate, and for applying a hard mask to a surface of the diamond substrate to define thereon a pattern of masked regions having a predetermined diameter surrounded by at least one exposed portion;

an etching device, adapted for operational coupling to the diamond substrate, and for vertically etching the exposed portion to at least the predetermined depth to thereby form a plurality of nanoposts corresponding to the masked regions; and

a harvesting device, adapted for operational coupling to the diamond structure, and for harvesting at least one nanopost from the diamond substrate to obtain a nanostructure having a diameter corresponding to the predetermined diameter, and a length corresponding to the predetermined depth.

14. The system of claim 13, wherein the diamond substrate includes a diamond substrate selected from the group consisting of high-purity diamond, low purity diamond, single crystal diamond, or multi-crystal diamond.

15. The system of claim 13, wherein the masking device includes one or more of a spin coater, a dip coater, and sputtering equipment adapted to apply a high-density monolayer of self-assembled dielectric or metallic nanoparticles.

16. The system of claim 13, wherein the masking device includes one or more of a thermal evaporator, an e-beam evaporator, and sputtering equipment adapted to apply the hard mask by heating a thin, evaporated layer of gold on the surface of the diamond substrate to thereby form a plurality of gold droplets, wherein the plurality of gold droplets correspond to the masked regions.

17. The system of claim 13, wherein the masking device includes one or more of a sputtering device and an e-beam evaporator adapted to damaging the surface of the diamond substrate to create variations in height of the surface, and wherein the masked regions correspond to the variations in height.

18. The system of claim 13, wherein the etching device includes one or more of an inductively coupled plasma device or a reactive ion etching device.

19. The system of claim 13, wherein the predetermined diameter of the masked regions is between approximately 25 nm and 225 nm, and wherein the predetermined depth is between approximately 50 nm and 1 mm.

20. The system of claim 13, wherein the predetermined diameter of the masked regions is approximately 50 urn and the predetermined depth is approximately 80 nm.

21. The system of claim 13, wherein the predetermined diameter of the masked regions is approximately 200 nm and the predetermined depth is approximately 400 nm.

22. The system of claim 13, wherein the harvesting device includes a mechanical device adapted to drag a second diamond slab having a surface arranged parallel to a plane of the diamond substrate across the plane at the predetermined depth to cleave the nanoposts from the diamond substrate.

23. The system of claim 13, wherein the harvesting device includes one or more of a vessel containing a solvent adapted to receive the diamond substrate, an agitator adapted to agitate the solvent, and a sonication horn adapted to agitate the solvent for removing the nanopost from the diamond substrate and thereby obtain the nanostructure.

24. The system of claim 13, wherein the masking device, the etching device, and the harvesting device are further adapted for repeating application of the hard mask, vertical etching of the exposed portion of the diamond substrate, and harvesting of the at least one nanopost to thereby perform layer by layer fabrication of diamond nanostructures from the diamond substrate.

25. The system of claim 13, further comprising:

an ion implantation device, adapted for operational coupling to the diamond substrate, and for implanting nitrogen atoms into the diamond nanostructure;

an annealing device, adapted to receive and anneal the nanostructure at approximately 850°

C. to mobilize vacancies therein and thereby form nitrogen vacancy centers; and

an oxidation device, adapted to receive and oxiginate the surface of the annealed nanostructure by oxidation at approximately 475°

C. to change the surface termination of the diamond surface and stabilize at least some of the negatively charged nitrogen vacancy centers.