CMOS-COMPATIBLE POLYCIDE FUSE STRUCTURE AND METHOD OF FABRICATING SAME
First Claim
Patent Images
1. A semiconductor structure, comprising:
- a substrate;
a polycide fuse structure disposed above the substrate and comprising silicon and a metal; and
a metal oxide semiconductor (MOS) transistor structure disposed above the substrate, the MOS transistor structure comprising a metal gate electrode.
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Accused Products
Abstract
CMOS-compatible polycide fuse structures and methods of fabricating CMOS-compatible polycide fuse structures are described. In an example, a semiconductor structure includes a substrate. A polycide fuse structure is disposed above the substrate and includes silicon and a metal. A metal oxide semiconductor (MOS) transistor structure is disposed above the substrate and includes a metal gate electrode.
17 Citations
25 Claims
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1. A semiconductor structure, comprising:
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a substrate; a polycide fuse structure disposed above the substrate and comprising silicon and a metal; and a metal oxide semiconductor (MOS) transistor structure disposed above the substrate, the MOS transistor structure comprising a metal gate electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A semiconductor structure, comprising:
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first and second semiconductor fins disposed above a substrate; a polycide fuse structure disposed above the first semiconductor fin but not above the second semiconductor fin, the polycide fuse structure comprising silicon and a metal; and a metal oxide semiconductor (MOS) transistor structure formed from the second semiconductor fin but not from the first semiconductor fin, the MOS transistor structure comprising a metal gate electrode. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A semiconductor structure, comprising:
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first and second semiconductor fins disposed above a substrate; an isolation region disposed above the substrate, between the first and second semiconductor fins, and at a height less than the first and second semiconductor fins; a polycide fuse structure disposed above the isolation region but not above the first and second semiconductor fins, the polycide fuse structure comprising silicon and a metal; and first and second metal oxide semiconductor (MOS) transistor structures formed from the first and second semiconductor fins, respectively, the MOS transistor structures each comprising a metal gate electrode. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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Specification