ELASTIC WAVE RESONATOR

• US 20160056791A1
• Filed: 09/25/2014
• Published: 02/25/2016
• Est. Priority Date: 10/03/2013
• Status: Active Grant

• Current Assignee: Skyworks Filter Solutions Japan Co., Ltd. (Skyworks Solutions Incorporated)
• Original Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Inventors: NAKAMURA, HIROYUKI, SHIMIZU, HIDEHITO
• Granted Patent: US 9,413,330 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H03H 9/02818 Means for compensation or elimination of undesirable effects
• CPC Class Codes: H03H 9/02834 of temperature influence cut angles H03H9/02543
• CPC Class Codes: H03H 9/02992 Details of bus bars, contact pads or other electrical connections for finger electrodes
• CPC Class Codes: H03H 9/1452 by finger overlap length, apodisation
• CPC Class Codes: H03H 9/14564 Shifted fingers transducers
• CPC Class Codes: H03H 9/14573 Arrow type transducers
• CPC Class Codes: H03H 9/14582 the last fingers having a different pitch

Abstract

An object of the present disclosure is to provide an elastic wave resonator having a high Q value, and producing little or no unwanted spurious signals. In order to achieve the object, an elastic wave resonator according to the present disclosure includes a piezoelectric substrate and an IDT electrode. The IDT electrode has an apodization-weighting portion in which a staggered section width decreases toward an end portion of the IDT electrode in an elastic wave propagation direction. The electrode finger pitch of the IDT electrode decreases toward an end portion of the IDT electrode in an end portion, in the elastic wave propagation direction, of a staggered region of the IDT electrode.

Claims

1. An elastic wave resonator comprising:

a piezoelectric substrate; and

an inter-digital transducer (IDT) electrode provided on the piezoelectric substrate,

the IDT electrode having a staggered region in which electrode fingers of a comb electrode alternate with electrode fingers of an opposite comb electrode, the staggered region having a width in an electrode finger extending direction that tapers toward an end portion of the staggered region in an elastic wave propagation direction, the staggered region including, in a central portion, a constant pitch region in which an electrode finger pitch is substantially constant, and, on outer sides of the constant pitch region, reduced pitch regions in which an electrode finger pitch is less than the electrode finger pitch in the constant pitch region, a width of the constant pitch region in the electrode finger extending direction tapering toward an end portion of the constant pitch region in the elastic wave propagation direction.

2. The elastic wave resonator of claim 1 wherein the electrode finger pitch of the reduced pitch regions become closer to the electrode finger pitch of the constant pitch region along directions in the reduced pitch regions approaching the constant pitch region.

3. The elastic wave resonator of claim 1 wherein the IDT electrode includes dummy electrode fingers, each dummy electrode finger having an end which faces an end of an electrode finger across a gap, the dummy electrode fingers facing electrode fingers in a portion of the staggered region which tapers toward the end portion of the staggered region, none of the dummy electrode fingers facing electrode fingers not in the portion of the staggered region which tapers toward the end portion of the staggered region.

4. The elastic wave resonator of claim 1 wherein reflector electrodes are provided on both outer sides of the IDT electrode in the elastic wave propagation direction, an average pitch of electrode fingers of the reflector electrodes being greater than an average pitch of the electrode fingers of the IDT electrode.

5. The elastic wave resonator of claim 1 further comprising a first dielectric material covering the IDT electrode above the piezoelectric substrate and a second dielectric material having a sonic velocity higher than a sonic velocity of the first dielectric material covering the first dielectric material, the second dielectric material including a thin film portion and a thick film portion, the thin film portion of the second dielectric material provided above end portions of electrode fingers not in a portion of the staggered region which tapers toward the end portion of the staggered region.

6. The elastic wave resonator of claim 5 wherein the second dielectric material includes a stack of a plurality of films.

17. The elastic wave resonator of claim 1 wherein a width of the constant pitch region in the elastic wave propagation direction tapers toward an end of the constant pitch region in an electrode finger extending direction.

18. The elastic wave resonator of claim 1 wherein widths of the reduced pitch regions in the electrode finger extending direction taper toward ends of the reduced pitch regions in the elastic wave propagation direction.

19. The elastic wave resonator of claim 1 wherein widths of the reduced pitch regions in the elastic wave propagation direction taper toward ends of the reduced pitch regions in the electrode finger extending direction.

20. The elastic wave resonator of claim 1 wherein an average electrode finger pitch in the reduced pitch regions is less than an average electrode finger pitch in the constant pitch region.

7. An elastic wave resonator comprising:

a piezoelectric substrate; and

an inter-digital transducer (IDT) electrode provided on the piezoelectric substrate,

the IDT electrode having a staggered region in which electrode fingers of a comb electrode alternate with electrode fingers of an opposite comb electrode, the staggered region having a width in an electrode finger extending direction that tapers toward an end portion of the staggered region in an elastic wave propagation direction, the staggered region including, in a central portion, a constant pitch region in which an electrode finger pitch is substantially constant, and, on outer sides of the constant pitch region, reduced pitch regions in which an electrode finger pitch is less than the electrode finger pitch in the constant pitch region, a width of the constant pitch region in the elastic wave propagation direction tapering toward an end portion of the constant pitch region in an electrode finger extending direction.

8. The elastic wave resonator of claim 7 wherein a width of the constant pitch region in the electrode finger extending direction tapers toward an end portion of the constant pitch region in the elastic wave propagation direction.

9. The elastic wave resonator of claim 7 wherein a width of the reduced pitch region in the electrode finger extending direction tapers toward ends of the reduced pitch regions in the elastic wave propagation direction.

10. The elastic wave resonator of claim 7 wherein widths of the reduced pitch regions in the elastic wave propagation direction taper toward ends of the reduced pitch regions in the electrode finger extending direction.

11. The elastic wave resonator of claim 7 wherein electrode fingers in the reduced pitch regions are bent.

12. The elastic wave resonator of claim 7 wherein reflector electrodes are provided on both outer sides of the IDT electrode in the elastic wave propagation direction, an average pitch of electrode fingers of the reflector electrodes being greater than an average pitch of the electrode fingers of the IDT electrode.

13. The elastic wave resonator of claim 7 wherein the electrode finger pitch in the reduced pitch regions decrease in the elastic wave propagation direction from 100% of the electrode finger pitch in the constant pitch region to 98% of the electrode finger pitch in the constant pitch region.

14. The elastic wave resonator of claim 7 wherein an average electrode finger pitch in the reduced pitch regions is less than an average electrode finger pitch in the constant pitch region.

15. The elastic wave resonator of claim 7 including a first dielectric material covering the IDT electrode and a second dielectric material having a sonic velocity higher than a sonic velocity of the first dielectric material covering the first dielectric material, the second dielectric material including thick portions and thin portions, the thin portions provided in regions covering end portions of electrode fingers in the staggered region.

16. The elastic wave resonator of claim 15 wherein thick portions of the second dielectric material are provided over end portions of electrode fingers in a portion of the staggered region having the width in the electrode finger extending direction that tapers toward the end portion of the staggered section in the elastic wave propagation direction.