PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY

• US 20160061853A1
• Filed: 08/06/2015
• Published: 03/03/2016
• Est. Priority Date: 08/27/2014
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: TAKIZAWA, Teruo
• Granted Patent: US 9,857,390 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: B81C 2203/0109 Bonding an individual cap on the substrate
• CPC Class Codes: B81C 2203/0145 Hermetically sealing an opening in the lid
• CPC Class Codes: B81C 2203/031 Anodic bondings
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 19/5783 Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
• CPC Class Codes: G01D 11/245 Housings for sensors
• CPC Class Codes: G01P 1/02 Housings
• CPC Class Codes: G01P 1/023 for acceleration measuring devices

Abstract

A physical quantity sensor has a package, which is provided with a substrate and a lid and has an internal space inside, and a functional element which is accommodated in the internal space, the lid is formed on a partition wall section which is provided on the periphery of the internal space in planar view and has a communication hole which causes a lower surface at the substrate side to communicate with an upper surface at the opposite side to the substrate, and the communication hole communicates with the internal space via a groove which is formed in the substrate.

Claims

1. A physical quantity sensor comprising:

a substrate;

a first concave section which is formed on the substrate;

a lid which is fixed to the substrate;

a second concave section which is formed on the lid;

a cavity which is formed from the first concave section and the second concave section;

a functional element which is accommodated in the cavity;

a communication hole which is formed in the lid and does not communicate with the second concave section; and

a groove which is formed in the substrate and communicates with the first concave section,

wherein the communication hole communicates with the cavity via the groove.

2. The physical quantity sensor according to claim 1, wherein a sealing material is disposed inside the communication hole, and the atmosphere of the functional element is sealed.

3. The physical quantity sensor according to claim 1,

wherein the communication hole has a portion in which a cross-sectional area tapers from a first surface side toward a second surface side.

4. The physical quantity sensor according to claim 1,

wherein the lid has a concave section which is open at the second surface,

the substrate has a concave section which is open at the surface of the lid side,

the openings of the two concave sections communicate with each other to form the cavity, and

in planar view, the communication hole is disposed at a position where at least the opening of the first surface side is shifted to the concave section of the lid.

5. The physical quantity sensor according to claim 4,

wherein, in planar view, the communication hole is disposed such that a portion of the opening of the second surface side overlaps with the concave section of the lid.

6. The physical quantity sensor according to claim 4,

wherein the groove is open at the surface on the lid side on the substrate.

7. The physical quantity sensor according to claim 4,

wherein the depth of the groove is shallower than the concave section on the substrate.

8. The physical quantity sensor according to claim 1,

wherein the width of the groove is wider than the opening on the first surface side of the communication hole.

9. The physical quantity sensor according to claim 1,

wherein the groove includes at least one of a bent section and a curved section between the communication hole and the cavity.

10. The physical quantity sensor according to claim 1,

wherein the groove is connected to the communication hole in the middle in the extension direction.

11. The physical quantity sensor according to claim 1,

wherein the groove is a liquid reservoir.

12. The physical quantity sensor according to claim 1,

wherein the cavity has a first cavity and a second cavity,

the functional element has a first functional element which is accommodated in the first cavity, and a second functional element which is accommodated in the second cavity,

the communication hole has a first communication hole which is formed in a partition wall section that is provided on the periphery of the first cavity, and a second communication hole which is formed in a partition wall section that is provided on the periphery of the second cavity, and

the groove has a first groove which causes the first communication hole to communicate with the first cavity, and a second groove which causes the second communication hole to communicate with the second cavity.

13. The physical quantity sensor according to claim 12,

wherein the first functional element is an acceleration detection element, and

the second functional element is an angular velocity detection element.

14. An electronic device comprising:

the physical quantity sensor according to claim 1.

15. An electronic device comprising:

the physical quantity sensor according to claim 2.

16. An electronic device comprising:

the physical quantity sensor according to claim 3.

17. An electronic device comprising:

the physical quantity sensor according to claim 4.

18. An electronic device comprising:

the physical quantity sensor according to claim 5.

19. An electronic device comprising:

the physical quantity sensor according to claim 6.

20. A mobile body comprising:

the physical quantity sensor according to claim 1.