Nanoporous Thin Film and Method for Fabricating the Same
First Claim
1. A nanoporous thin film fabricating method for fabricating a nanoporous thin film with a composite photocatalyst structure for a photodegradation and a water purification, comprising:
- providing a porous substrate with a plurality of through-nanopores therein, each of which through-nanopores have an inner tube wall;
forming an oxide-based photocatalyst layer over the porous substrate and the inner tube wall by using a first chemical-based deposition process; and
forming a metal-based photocatalyst layer on a part of the oxide-based photocatalyst layer by using a second chemical-based deposition process.
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Abstract
The present invention relates to a nanoporous thin film and a method for fabricating the same. The nanoporous thin film fabricating method for fabricating a nanoporous thin film with a composite photocatalyst structure for a photodegradation and a water purification includes providing a porous substrate with a plurality of through-nanopores therein, each of which through-nanopores have an inner tube wall; forming an oxide-based photocatalyst layer over the porous substrate and the inner tube wall by using a first chemical-based deposition process; and forming a metal-based photocatalyst layer on a part of the oxide-based photocatalyst layer by using a second chemical-based deposition process.
6 Citations
17 Claims
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1. A nanoporous thin film fabricating method for fabricating a nanoporous thin film with a composite photocatalyst structure for a photodegradation and a water purification, comprising:
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providing a porous substrate with a plurality of through-nanopores therein, each of which through-nanopores have an inner tube wall; forming an oxide-based photocatalyst layer over the porous substrate and the inner tube wall by using a first chemical-based deposition process; and forming a metal-based photocatalyst layer on a part of the oxide-based photocatalyst layer by using a second chemical-based deposition process. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A nanoporous thin film having a composite photocatalyst structure for a photodegradation and a water purification and manufactured by using a chemical-based deposition process, comprising:
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a porous substrate with an array of through-nanopores therein, each of which through-nanopores have an inner tube wall; an oxide-based photocatalyst layer formed over the porous substrate and the inner tube wall by the chemical-based deposition process; and a metal-based photocatalyst layer formed on a part of the oxide-based photocatalyst layer by the same chemical-based deposition process. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification