PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY
First Claim
1. A physical quantity sensor element comprising:
- a first mass portion and a second mass portion which are formed into a plane-shape along a reference surface and vibrate in a direction along a normal line of the reference surface;
a first supporting portion;
a first beam portion for connecting the first mass portion and the first supporting portion with each other;
a second supporting portion;
a second beam portion for connecting the second mass portion and the second supporting portion with each other; and
a coupling portion of which one end portion is connected to a portion in the first mass portion, and the other end portion is connected to a portion in the second mass portion,wherein the first mass portion is connected to the one end portion of the coupling portion, and includes a first easily deformable portion which is deformable so as to reduce a change of a posture of the first mass portion with respect to the reference surface, andwherein the second mass portion is connected to the other end portion of the coupling portion, and includes a second easily deformable portion which is deformable so as to reduce a change of a posture of the second mass portion with respect to the reference surface.
2 Assignments
0 Petitions
Accused Products
Abstract
A physical quantity sensor element of the invention is formed into a plane-shape along an XY plane, and is provided with two driving portions which vibrate in a Z-axis direction, two detecting portions, four beam portions which connect one driving portion and one detecting portion, four beam portions which connect the other detecting portion and the other driving portion, and a coupling portion of which one end is connected to a portion in one of the driving portion and the other end is connected to a portion in the other diving portion in which the each of the deriving portions includes a beam portion which is connected to the end portion of the coupling portion and is deformable so as to reduce a change of a posture of each of the driving portions with respect to an XY plane.
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Citations
20 Claims
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1. A physical quantity sensor element comprising:
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a first mass portion and a second mass portion which are formed into a plane-shape along a reference surface and vibrate in a direction along a normal line of the reference surface; a first supporting portion; a first beam portion for connecting the first mass portion and the first supporting portion with each other; a second supporting portion; a second beam portion for connecting the second mass portion and the second supporting portion with each other; and a coupling portion of which one end portion is connected to a portion in the first mass portion, and the other end portion is connected to a portion in the second mass portion, wherein the first mass portion is connected to the one end portion of the coupling portion, and includes a first easily deformable portion which is deformable so as to reduce a change of a posture of the first mass portion with respect to the reference surface, and wherein the second mass portion is connected to the other end portion of the coupling portion, and includes a second easily deformable portion which is deformable so as to reduce a change of a posture of the second mass portion with respect to the reference surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A physical quantity sensor element comprising:
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a first mass portion and a second mass portion which are formed into a plane-shape along a reference surface and vibrate in a direction along a normal line of the reference surface; a first supporting portion; a first beam portion for connecting the first mass portion and the first supporting portion; a second supporting portion; a second beam portion for connecting the second mass portion and the second supporting portion; and a coupling portion of which one end portion is connected to a portion in the first mass portion, and the other end portion is connected to a portion in the second mass portion, wherein the first mass portion is connected to the one end portion of the coupling portion, and includes a fifth beam portion which extends in a direction intersecting with a direction in which the coupling portion extends, and wherein the second mass portion is connected to the other end portion of the coupling portion, and includes a sixth beam portion which extends in a direction intersecting with a direction in which the coupling portion extends. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification