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PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY

  • US 20160069684A1
  • Filed: 09/03/2015
  • Published: 03/10/2016
  • Est. Priority Date: 09/05/2014
  • Status: Active Grant
First Claim
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1. A physical quantity sensor element comprising:

  • a first mass portion and a second mass portion which are formed into a plane-shape along a reference surface and vibrate in a direction along a normal line of the reference surface;

    a first supporting portion;

    a first beam portion for connecting the first mass portion and the first supporting portion with each other;

    a second supporting portion;

    a second beam portion for connecting the second mass portion and the second supporting portion with each other; and

    a coupling portion of which one end portion is connected to a portion in the first mass portion, and the other end portion is connected to a portion in the second mass portion,wherein the first mass portion is connected to the one end portion of the coupling portion, and includes a first easily deformable portion which is deformable so as to reduce a change of a posture of the first mass portion with respect to the reference surface, andwherein the second mass portion is connected to the other end portion of the coupling portion, and includes a second easily deformable portion which is deformable so as to reduce a change of a posture of the second mass portion with respect to the reference surface.

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