PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY
First Claim
1. A physical quantity sensor element comprising:
- a supporting portion;
a mass portion; and
a beam portion which connects the supporting portion and the mass portion to each other,wherein the beam portion includes a branched portion.
2 Assignments
0 Petitions
Accused Products
Abstract
A physical quantity sensor element is provided with a detecting portion, a driving portion, a beam portion which connects a detecting portion and the driving portion to each other, and in which the beam portion includes a branched portion. The beam portion includes two mass portion side beam portions which extend from two position of the driving portion, which are different from each other, and two supporting portion side beam portions which extend from two positions of the detecting portion, which are different from each other, and in which both end portions on the detecting portion side of two mass portion side beam portions are connected to each other, and both end portions on the driving portion side of two supporting portion side beam portions are connected to each other.
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Citations
18 Claims
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1. A physical quantity sensor element comprising:
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a supporting portion; a mass portion; and a beam portion which connects the supporting portion and the mass portion to each other, wherein the beam portion includes a branched portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification