SENSOR, STRAIN SENSOR, AND PRESSURE SENSOR
First Claim
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1. A sensor comprising:
- a first structure that is attachable to a measurement specimen;
a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being connected to the first structure; and
a detector that is connected to an upper surface of the second structure, the detector being configured to detect a displacement of the second structure.
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Abstract
A sensor includes a first structure that is attachable to a measurement specimen, a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being connected to the first structure, and a detector that is connected to an upper surface of the second structure, the detector being configured to detect a deformation of the second structure.
7 Citations
20 Claims
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1. A sensor comprising:
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a first structure that is attachable to a measurement specimen; a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being connected to the first structure; and a detector that is connected to an upper surface of the second structure, the detector being configured to detect a displacement of the second structure.
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2. A strain sensor comprising:
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a first structure that is attached to a measurement specimen; a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being annularly connected to the first structure; and a strain detector that is connected to an upper surface of the second structure, the strain detector being configured to detect a strain of the second structure. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A pressure sensor comprising:
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a first structure that has a through-hole communicating with a measurement fluid; a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being annularly connected to the first structure, the second structure having a space communicating with the through-hole; and a strain detector that is connected to an upper surface of the second structure, the strain detector being configured to detect a strain of the second structure. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification