Fluid Pressure Sensor
First Claim
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1. A pressure sensor for measuring a fluid pressure, comprising:
- a fluid space formed between a first diaphragm and a second diaphragm;
a fluid supply element connecting the fluid space with an exterior opening of the pressure sensor;
a first measuring electrode arranged opposite the first diaphragm, the first diaphragm and the first measuring electrode forming a first capacitor having a first capacitance that varies with a change in position of the first diaphragm; and
a second measuring electrode arrange opposite the second diaphragm, the second diaphragm and the second measuring electrode forming a second capacitor having a second capacitance that varies with a change in position of the second diaphragm,wherein a fluid pressure of a fluid in the fluid space can be determined by evaluating the first capacitance and the second capacitance.
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Abstract
The disclosure relates to a pressure sensor for measuring a fluid pressure, in particular a vacuum pressure. The pressure sensor contains a first and a second diaphragm connected to one another such that they enclose and hermetically seal a fluid space. Fluid can enter and exit the fluid space through a fluid supply element, which is connected to an exterior opening of the sensor. Each of the diaphragms is proximal to a reference electrode and forms a variable capacitor, the capacitance of which depends on the position of the diaphragms, which in turn depends on the pressure in the fluid space.
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Citations
43 Claims
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1. A pressure sensor for measuring a fluid pressure, comprising:
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a fluid space formed between a first diaphragm and a second diaphragm; a fluid supply element connecting the fluid space with an exterior opening of the pressure sensor; a first measuring electrode arranged opposite the first diaphragm, the first diaphragm and the first measuring electrode forming a first capacitor having a first capacitance that varies with a change in position of the first diaphragm; and a second measuring electrode arrange opposite the second diaphragm, the second diaphragm and the second measuring electrode forming a second capacitor having a second capacitance that varies with a change in position of the second diaphragm, wherein a fluid pressure of a fluid in the fluid space can be determined by evaluating the first capacitance and the second capacitance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A stacked pressure sensor for measuring a fluid pressure, comprising:
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a base plate forming a lower wall of a housing; a first spacer element arranged above the base plate; a first diaphragm arranged above the first spacer element, an outer edge of the first diaphragm resting on the first spacer element; a diaphragm spacer element arranged above the first diaphragm; a second diaphragm arranged above the diaphragm spacer element, the outer edge of the second diaphragm resting at a fixed distance from the outer edge of the first diaphragm on the diaphragm spacer element; a second spacer element arranged above the second diaphragm; and a cover plate arranged above the second spacer element forming an upper wall of the housing. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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Specification