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MICROCHIP SUBSTANCE DELIVERY DEVICES HAVING LOW-POWER ELECTROMECHANICAL RELEASE MECHANISMS

  • US 20160074323A1
  • Filed: 09/11/2014
  • Published: 03/17/2016
  • Est. Priority Date: 09/11/2014
  • Status: Active Grant
First Claim
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1. An electromechanical device, comprising:

  • a substrate comprising a cavity formed in a surface of the substrate;

    a membrane disposed on the surface of the substrate covering an opening of the cavity;

    a seal disposed between the membrane and the surface of the substrate, wherein the seal surrounds the opening of the cavity, and wherein the seal and membrane are configured to enclose the cavity and retain a substance within the cavity; and

    an electrode structure configured to locally heat a portion of the membrane in response to a control voltage applied to the electrode structure, and create a stress that causes a rupture in the locally heated portion of the membrane to release the substance from within the cavity.

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