Inorganic-organic Hybrid Oxide Polymer and Manufacturing Method thereof

• US 20160075884A1
• Filed: 02/10/2015
• Published: 03/17/2016
• Est. Priority Date: 02/10/2014
• Status: Active Grant

• Current Assignee: National Tsing Hua University
• Original Assignee: National Tsing Hua University
• Inventors: Chen, Hsueh-Shih
• Granted Patent: US 9,982,140 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: C08G 83/001 Macromolecular compounds containing organic and inorganic sequences, e.g. organic polymers grafted onto silica
• CPC Class Codes: C09D 5/00 Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced electrically insulating plastics, resins or waxes H01B3/30; Filling pastes

Abstract

An inorganic-organic hybrid oxide polymer is provided. The polymer consists of an inorganic molecular cluster M_xN_yO_z and an organic molecular polymer cluster OG, wherein the inorganic molecular cluster M_xN_yO_z consists of a hybrid oxidation based on a first element M and a second element N and has a molecular formula M_xN_yO_z , wherein x=0.01˜0.99, y=0.01˜0.99, z/(x+y)=0.01˜3.99, and the inorganic molecular cluster M_xN_yO_z has a plurality of voids having an averaged characteristic dimension in a range between 0.2 nm˜30 nm and filled with the organic molecular polymer cluster OG, wherein the first element M and the second element N are respectively selected from a group consisting of an intermediate element, a metal element, a semiconductor element and a combination thereof and the first element M is different from the second element N.

Claims

1. A method of manufacturing an inorganic-organic hybrid oxide polymer, comprising the steps of:

providing a first precursor comprising an oxide of first element M and an organic molecule cluster OG and a second precursor comprising an oxide of second element N, wherein the first element M is one selected from a group consisting of a transition element group, a metal element group, a semiconductor group and the combination thereof, the second element N is one selected from a group consisting of a transition element group, a metal element group, a semiconductor group and the combination thereof, and the first element M is different from the second element N;

causing the first precursor and the second precursor to perform a cohydrolysis-condensation reaction to form a polymer; and

placing the polymer in an environment with a temperature ranged between 50°

C. and 100°

C. and a pressure condition equal to or less than or 1 atm for lasting one hour to form a hybrid oxide M_xN_yO_z based on the first element M and a second element N, wherein the hybrid oxide M_xN_yO_z has plurality of voids, the plurality of voids have an average featured diameter in a range between 0.2 nm and 30 nm and the organic molecule cluster OG is filled within the voids, so as to synthesize a hybrid oxide organic-inorganic polymer M_xN_yO_z/OG based on the first element M and the second element N.

2. The method according to claim 1 further comprising the steps of:

providing a substrate;

causing the first precursor and the second precursor to perform a cohydrolysis-condensation reaction to form a polymer;

selectively mixing one of an acid or an alkali into the polymer;

causing the polymer to form a film on the substrate by a spin-on coating scheme;

placing the film in an environment with a temperature ranged between 50°

C. and 100°

C. and a pressure condition equal to or less than or 1 atm for lasting one hour to form a hybrid oxide M_xN_yO_z/OG film based on the first element M and the second element N; and

heating the hybrid oxide M_xN_yO_z/OG film by a relatively high temperature to decompose the organic molecule cluster OG.

3. The method according to claim 2 further comprising the step of:

selectively mixing one of an acid or an alkali into the polymer to respectively form a relatively high dense film or a relatively coarse film.

5. The polymer according to claim 4 being made by one of the following method:

the method as claimed in claim 1; and

a wet chemical process which controls the reaction rate of hydrolyzing the precursor to a molecule cluster and controls the mutual reaction among the molecule clusters.

4. An organic-inorganic hybrid oxide polymer, comprising:

an amorphous organic-inorganic polymer consisting of an inorganic molecule cluster M_xN_yO_z and an organic molecule cluster OG and having a molecular formula of M_xN_yO_z/OG, wherein

the inorganic molecules cluster M_xN_yO_z consists of a hybrid oxide of a first element M and a second element N and having a molecular formula of M_xN_yO_z , wherein x=0.01˜

0.99, y=0.01˜

0.99 and z/(x+y)=0.01˜

3.99, and the inorganic molecule cluster M_xN_yO_z comprises a plurality of voids, wherein the plurality of voids have an average featured diameter in a range between 0.2 nm and 30 nm and the organic molecule cluster OG is filled within the voids, wherein

the organic molecule cluster OG has a molecular formula of (C_xH_yO_z)_n, wherein x=1˜

10, y=1˜

10, z=1˜

10 and n=1˜

2000 k, wherein

the first element M and the second element N are respectively one selected from a group consisting of a transition element group, a metal element group, a semiconductor group and the combination thereof and the first element M is different from the second element N.

6. The polymer according to claim 4, wherein the organic molecule cluster OG is a 2,4-pentanedione (acetylacetone, entane-2,4-dione, acetylacetone, acac) organic molecule.

7. The polymer according to claim 4, wherein the first element M and the second element N are respectively one selected from a group consisting of a silicon (Si) element, a titanium (Ti) element, an iron (Fe) element, a zirconium (Zr) element, an aluminum (Al) element, a lanthanum (La) element, a lutetium (Lu) element, a strontium (Sr) element, a ruthenium (Ru) element, a zinc (Zn) elements, a cadmium (Cd) element, a copper (Cu) elements, a silver (Ag) elements, a gold (Au) elements, a nickel (Ni) element, a platinum (Pt) elements, a palladium (Pd) element, a vanadium (V) elements, a molybdenum (Mo) element, a selenium (Se) element, a germanium (Ge) element, gallium (Ga) element, an indium (In) element, a sulfur (S) element, a tin (Sn) and the combinations thereof.

8. The polymer according to claim 7, wherein the first element M is the titanium (Ti) element, the second element N is the silicon (Si) element, x=0.2˜

0.4, y=0.6˜

0.8 and z/(x+y)=1.5˜

1.9 and the hybrid oxide organic-inorganic polymer has a molecular formula of (TiSi)_1.01O_1.84/acac.

9. The polymer according to claim 7, wherein the first element M is the titanium (Ti) element, the second element N is the iron (Fe) element, x=0.3˜

0.5, y=0.5˜

0.7 and z/(x+y)=1.3˜

1.8 and the hybrid oxide organic-inorganic polymer has a molecular formula of (TiFe)_2.99O_5.76/acac.

10. The polymer according to claim 4 further comprising one of the following characteristics:

the inorganic molecules cluster M_xN_yO_z occupying more than 99% over the entire polymer;

the volume percentage of the voids with respect to of the entire polymer being in a range between 0.01% and 1%;

the plurality of voids having a average featured diameter in a range between 0.5 nm and 20 nm; and

the polymer having the hardness equal to or greater than a pencil hardness 9H.