SUSTAINED SELF-SPUTTERING OF LITHIUM FOR LITHIUM PHYSICAL VAPOR DEPOSITION
First Claim
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1. A method of sustained self-sputtering of lithium in a sputtering station having a lithium metal target, the method comprising:
- initiating a lithium sputtering reaction in the sputtering station by igniting an initial plasma comprising a majority fraction of inert gas ions; and
inducing a sustained lithium self-sputtering reaction by reducing supply of an inert gas to the sputtering station under conditions that provide a sustained self-sputtering lithium plasma comprising a majority fraction of lithium ions.
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Abstract
A method of sustained self-sputtering of lithium in a sputtering station having a lithium metal target, the method comprising initiating a lithium sputtering reaction in the sputtering station by igniting an initial plasma comprising a majority fraction of inert gas ions and inducing a sustained lithium self-sputtering reaction by reducing supply of an inert gas to the sputtering station under conditions that provide a sustained self-sputtering lithium plasma comprising a majority fraction of lithium ions.
4 Citations
24 Claims
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1. A method of sustained self-sputtering of lithium in a sputtering station having a lithium metal target, the method comprising:
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initiating a lithium sputtering reaction in the sputtering station by igniting an initial plasma comprising a majority fraction of inert gas ions; and inducing a sustained lithium self-sputtering reaction by reducing supply of an inert gas to the sputtering station under conditions that provide a sustained self-sputtering lithium plasma comprising a majority fraction of lithium ions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A sustained lithium self-sputtering apparatus comprising:
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a sputtering station comprising; a chamber; an anode in the chamber; a lithium metal target in the chamber, wherein the lithium metal target is a cathode; a voltage source electrically connected to the anode and to the cathode; and an inlet for regulating flow of an inert gas to the chamber; and a controller configured to provide conditions in the sputtering station to induce and maintain a sustained self-sputtering lithium plasma, wherein the controller is configured to communicate signals to the voltage source to coordinate delivery of a potential between the anode and the cathode and to communicate signals to the inlet to regulate the flow of the inert gas. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification