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SUSTAINED SELF-SPUTTERING OF LITHIUM FOR LITHIUM PHYSICAL VAPOR DEPOSITION

  • US 20160076139A1
  • Filed: 04/24/2014
  • Published: 03/17/2016
  • Est. Priority Date: 04/24/2013
  • Status: Active Grant
First Claim
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1. A method of sustained self-sputtering of lithium in a sputtering station having a lithium metal target, the method comprising:

  • initiating a lithium sputtering reaction in the sputtering station by igniting an initial plasma comprising a majority fraction of inert gas ions; and

    inducing a sustained lithium self-sputtering reaction by reducing supply of an inert gas to the sputtering station under conditions that provide a sustained self-sputtering lithium plasma comprising a majority fraction of lithium ions.

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