INTEGRATED CHEMICAL SENSOR CHIP
First Claim
1. An integrated chemical sensor chip, comprising on or integrated in a common substratea chemically sensitive layer,a heater for heating the sensitive layer,a memory for the storage of a measurement routine, the measurement routine comprising instructions defining a heating process over time and instructions defining one or more measurement points in time,an I/O interface for receiving a trigger for the measurement routine and for supplying a result of the measurement routine, andan engine for controlling the heater and for measuring a resistance of the sensitive layer according the instructions of the measurement routine in response to receiving a trigger for the measurement routine.
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Accused Products
Abstract
An integrated chemical sensor chip comprises on or integrated in a common substrate a chemically sensitive layer and a heater heating the sensitive layer. In addition, a memory is provided for the storage of a measurement routine, the measurement routine comprising instructions defining a heating process over time and instructions defining one or more measurement points in time. An I/O interface is provided for receiving a trigger for the measurement routine and for supplying a result of the measurement routine. An engine controls the heater and measures a resistance of the sensitive layer according the instructions of the measurement routine.
9 Citations
13 Claims
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1. An integrated chemical sensor chip, comprising on or integrated in a common substrate
a chemically sensitive layer, a heater for heating the sensitive layer, a memory for the storage of a measurement routine, the measurement routine comprising instructions defining a heating process over time and instructions defining one or more measurement points in time, an I/O interface for receiving a trigger for the measurement routine and for supplying a result of the measurement routine, and an engine for controlling the heater and for measuring a resistance of the sensitive layer according the instructions of the measurement routine in response to receiving a trigger for the measurement routine.
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13. Method for conducting a measurement with an integrated chemical sensor chip, wherein the integrated chemical sensor chip
receives a trigger for a measurement routine, in response to the trigger controls a heater of the integrated chemical sensor chip according to instructions stored in a memory of the integrated chemical sensor chip defining a heating process over time, and measures a resistance of a chemically sensitive layer of the integrated chemical sensor chip according to instructions stored in the memory defining one or more measurement points in time, and supplies a result of the measurement routine.
Specification