METHOD TO PATTERN <10 MICROMETER CONDUCTING AND PASSIVATING FEATURES ON 3D SUBSTRATES FOR IMPLANTABLE DEVICES
First Claim
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1. A method of fabricating an implantable device, comprising the steps of:
- providing a base,providing a rotation system for rotating said base,providing a deposition system for depositing material on said base,using said rotation system and said deposition system to deposit at least one electrode on said base,using said rotation system and said deposition system to deposit at least one electrically conducting lead on said base coupled to said at least one electrode, andusing said rotation system and said deposition system to deposit a protective coating on said base covering said at least one electrically conducting lead.
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Abstract
An implantable device has a cylindrical base, at least one electrode on the cylindrical base, at least one electrically conducting lead on the cylindrical base connected to the electrode wherein the electrically conducting lead has a feature size of <10 micrometers. A protective coating on the cylindrical base covers the at least one electrically conducting lead.
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Citations
20 Claims
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1. A method of fabricating an implantable device, comprising the steps of:
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providing a base, providing a rotation system for rotating said base, providing a deposition system for depositing material on said base, using said rotation system and said deposition system to deposit at least one electrode on said base, using said rotation system and said deposition system to deposit at least one electrically conducting lead on said base coupled to said at least one electrode, and using said rotation system and said deposition system to deposit a protective coating on said base covering said at least one electrically conducting lead. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of fabricating an implantable device, comprising the steps of:
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providing a base, providing a rotation system for rotating said base, providing a coating system for coating said base, providing an ablating system for abating at least a portion of said coating, using said rotation system, said coating system, and said ablating system to form at least one electrode on said base, using said rotation system, said coating system, and said ablating system to form at least one electrically conducting lead on said base coupled to said at least one electrode, and using said rotation system and said coating system deposit a protective coating on said base covering said at least one electrically conducting lead. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. An implantable device, comprising:
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a cylindrical base, at least one electrode on said cylindrical base, at least one electrically conducting lead on said cylindrical base connected to said electrode wherein said electrically conducting lead has a feature size of <
10 micrometers, and a protective coating on said cylindrical base covering said at least one electrically conducting lead. - View Dependent Claims (18, 19, 20)
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Specification