SENSOR
First Claim
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1. A sensor comprising:
- a first substrate;
a supporter connected to the first substrate;
a weight facing the first substrate;
a beam having a first end and a second end, the first end being connected to the supporter, the second end being connected to the weight;
a second substrate facing the weight;
a first projection disposed on the first substrate;
a second projection disposed on the first substrate;
a third projection disposed on the second substrate; and
a fourth projection disposed on the second substrate,wherein an interval between the first projection and the second projection is smaller than an interval between the third projection and the fourth projection.
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Abstract
A sensor includes a first substrate, a supporter connected to the first substrate, a weight facing the first substrate, a beam of which first end is connected to the supporter and of which second end is connected to the weight, a second substrate facing the weight, and a first projection disposed on the first substrate. This senor allows effectively preventing the beam from a breakage caused by the beam twisted due to a rotation of the weight when an impact is applied to the sensor. The sensor thus can improve anti-impact property.
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Citations
21 Claims
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1. A sensor comprising:
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a first substrate; a supporter connected to the first substrate; a weight facing the first substrate; a beam having a first end and a second end, the first end being connected to the supporter, the second end being connected to the weight; a second substrate facing the weight; a first projection disposed on the first substrate; a second projection disposed on the first substrate; a third projection disposed on the second substrate; and a fourth projection disposed on the second substrate, wherein an interval between the first projection and the second projection is smaller than an interval between the third projection and the fourth projection. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A sensor comprising:
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a substrate; a supporter connected to the substrate; a beam having a first end and a second end opposite to the first end, the first end being connected to the supporter, the beam extending from the first end in an extending direction; a weight facing the substrate; and a first projection disposed on the substrate, wherein the weight has an edge inclining with respect to the extending direction, wherein the first projection has an edge extending in the extending direction, and wherein, in a top view, the first projection includes a portion exposed from the weight and a portion not exposed from the weight. - View Dependent Claims (12)
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13. A sensor comprising:
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a first substrate; a supporter connected to the first substrate; a weight facing the first substrate; a beam having a first end and a second end, the first end being connected to the supporter, the second end being connected to the weight; a second substrate facing the weight; a first projection disposed on the first substrate; and a second projection disposed on the second substrate, wherein a thickness of the first projection is different from a thickness of the second projection.
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14. A sensor comprising:
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a substrate; a supporter disposed on an upper surface of the substrate; a weight facing the upper surface of the substrate; a beam having one end and another end, the one end being connected to the supporter, the another end being connected to the weight; and a first projection, a second projection, and a third projection which are disposed on the upper surface of the substrate or on a lower surface of the weight, wherein the weight has a width larger than a width of the beam, wherein an interval between the first projection and the second projection is larger than the width of the beam, and is smaller than the width of the weight, wherein the third projection is disposed between the first projection and the second projection, and is closer to the supporter than the first projection and the second projection, and wherein a border between the weight and the beam is located above the third projection. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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Specification