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SENSOR

  • US 20160084870A1
  • Filed: 04/17/2014
  • Published: 03/24/2016
  • Est. Priority Date: 04/26/2013
  • Status: Abandoned Application
First Claim
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1. A sensor comprising:

  • a first substrate;

    a supporter connected to the first substrate;

    a weight facing the first substrate;

    a beam having a first end and a second end, the first end being connected to the supporter, the second end being connected to the weight;

    a second substrate facing the weight;

    a first projection disposed on the first substrate;

    a second projection disposed on the first substrate;

    a third projection disposed on the second substrate; and

    a fourth projection disposed on the second substrate,wherein an interval between the first projection and the second projection is smaller than an interval between the third projection and the fourth projection.

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