Three-Axis Accelerometer
1 Assignment
0 Petitions
Accused Products
Abstract
A three-axis accelerometer to provide measurement of acceleration in three axes, comprising a substrate, a suspending mass block suspended in the substrate, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a group of X direction displacement sensors; wherein the Y direction displacement sensors, the Z direction displacement sensors and the X direction displacement sensors are respectively arranged adjacent to the mass block; the mass block and the displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, regions corresponding to the Y, Z and X direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y, Z and X groups displacement sensors respectively comprise at least two metal layers connected by a via.
18 Citations
44 Claims
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23. A three-axis micro accelerometer, comprising a substrate, a suspending mass block suspended in the substrate, a group of Y direction displacement detection electrodes, a group of Z direction displacement detection electrodes and a group of X direction displacement detection electrodes;
- the Y, Z and X direction displacement detection electrodes being arranged on the substrate adjacent to the mass block;
the Y and X directions being perpendicular in a plane of the mass block and the Z direction being perpendicular to the plane;wherein; the mass block and the Y, Z and X direction displacement detection electrodes respectively comprise a plurality of metal layers and a dielectric layer between two metal layers; in the mass block, portions corresponding to the Y, Z and X direction displacement detection electrodes respectively comprise at least two metal layers connected by a via; each of the Y, Z and X direction displacement detection electrodes comprises two sub-groups of electrodes, each comprising at least two metal layers connected by a via; and the Y direction displacement detection electrodes and the Z direction displacement detection electrodes are provided in a first portion of a structure formed by the mass block and the detection electrodes and the X direction displacement detection electrodes is provided in a second portion of the structure other than the first portion. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
- the Y, Z and X direction displacement detection electrodes being arranged on the substrate adjacent to the mass block;
Specification