DISPLACEMENT DETECTION TYPE SIX-AXIS FORCE SENSOR
First Claim
1. A six-axis force sensor comprising:
- a fixed part;
a first movable part;
a first connecting part configured to connect said first movable part to said fixed part so that the first movable part is able to be elastically displaced in a direction parallel to a first axis, a direction parallel to a second axis orthogonal to the first axis and a rotational direction about a third axis orthogonal to both of the first axis and the second axis, in a three-axis rectangular coordinate system;
a second movable part;
a second connecting part configured to connect said second movable part to said first movable part so that the second movable part is able to be elastically displaced in a rotational direction about said first axis, a rotational direction about said second axis and a direction parallel to said third axis, in said three-axis rectangular coordinate system;
a first detecting section configured to detect a displacement of said first movable part relative to said fixed part; and
a second detecting section configured to detect a displacement of said second movable part relative to said first movable part;
wherein the six-axis force sensor enables a detection of a force component in a direction of said first axis, a force component in a direction of said second axis, a force component in a direction of said third axis, a moment component about said first axis, a moment component about said second axis and a moment component about said third axis, of a force applied to said second movable part, with reference to a detection value of said first detecting section and a detection value of said second detecting section.
1 Assignment
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Accused Products
Abstract
A six-axis force sensor including a fixed part; a first movable part; a first connecting part connecting the first movable part to the fixed part in an elastically displaceable manner; a second movable part; a second connecting part connecting the second movable part to the first movable part in an elastically displaceable manner; a first detecting section detecting a displacement of the first movable part relative to the fixed part; and a second detecting section detecting a displacement of the second movable part relative to the first movable part. The six-axis force sensor enables, in a three-axis rectangular coordinate system, a detection of force components in first axis, second axis and third axis directions, and moment components about the first axis, the second axis and the third axis, of a force applied to the second movable part, with reference to detection values of the first and second detecting sections.
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Citations
12 Claims
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1. A six-axis force sensor comprising:
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a fixed part; a first movable part; a first connecting part configured to connect said first movable part to said fixed part so that the first movable part is able to be elastically displaced in a direction parallel to a first axis, a direction parallel to a second axis orthogonal to the first axis and a rotational direction about a third axis orthogonal to both of the first axis and the second axis, in a three-axis rectangular coordinate system; a second movable part; a second connecting part configured to connect said second movable part to said first movable part so that the second movable part is able to be elastically displaced in a rotational direction about said first axis, a rotational direction about said second axis and a direction parallel to said third axis, in said three-axis rectangular coordinate system; a first detecting section configured to detect a displacement of said first movable part relative to said fixed part; and a second detecting section configured to detect a displacement of said second movable part relative to said first movable part; wherein the six-axis force sensor enables a detection of a force component in a direction of said first axis, a force component in a direction of said second axis, a force component in a direction of said third axis, a moment component about said first axis, a moment component about said second axis and a moment component about said third axis, of a force applied to said second movable part, with reference to a detection value of said first detecting section and a detection value of said second detecting section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification