TEMPERATURE SENSING APPARATUS, LASER PROCESSING SYSTEM, AND TEMPERATURE MEASURING METHOD
First Claim
1. A temperature sensing apparatus configured to measure a temperature distribution of a surface to be measured, the temperature sensing apparatus comprising:
- a lens set configured to receive radiation from the surface to be measured;
a filtering module configured to filter the radiation from the lens set into a plurality of radiation portions respectively having different wavelengths;
a plurality of sensor arrays configured to respectively sense the radiation portions; and
a processing unit configured to calculate an intensity ratio distribution of the radiation between the different wavelengths according to the radiation portions respectively sensed by the sensor arrays and determine the temperature distribution according to the intensity ratio distribution.
1 Assignment
0 Petitions
Accused Products
Abstract
A temperature sensing apparatus configured to measure a temperature distribution of a surface to be measured is provided. The temperature sensing apparatus includes a lens set, a filtering module, a plurality of sensor arrays, and a processing unit. The lens set is configured to receive radiation from the surface to be measured. The filtering module is configured to filter the radiation from the lens set into a plurality of radiation portions respectively having different wavelengths. The sensor arrays are configured to respectively sense the radiation portions. The processing unit is configured to calculate an intensity ratio distribution of the radiation between the different wavelengths according to the radiation portions respectively sensed by the sensor arrays and determine the temperature distribution according to the intensity ratio distribution. A laser processing system and a temperature measuring method are also provided.
-
Citations
29 Claims
-
1. A temperature sensing apparatus configured to measure a temperature distribution of a surface to be measured, the temperature sensing apparatus comprising:
-
a lens set configured to receive radiation from the surface to be measured; a filtering module configured to filter the radiation from the lens set into a plurality of radiation portions respectively having different wavelengths; a plurality of sensor arrays configured to respectively sense the radiation portions; and a processing unit configured to calculate an intensity ratio distribution of the radiation between the different wavelengths according to the radiation portions respectively sensed by the sensor arrays and determine the temperature distribution according to the intensity ratio distribution. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A laser processing system comprising:
-
a laser source configured to emit a laser beam; a scanning unit configured to cause the laser beam to scan a surface; and a temperature sensing apparatus configured to measure a temperature distribution of the scanned surface, the temperature sensing apparatus comprising; a lens set configured to receive radiation from the scanned surface; a filtering module configured to divide the radiation from the lens set into a plurality of radiation portions respectively having different wavelengths; a plurality of sensor arrays configured to respectively sense the radiation portions; and a processing unit configured to calculate an intensity ratio distribution of the radiation between the different wavelengths according to the radiation portions respectively sensed by the sensor arrays and determine the temperature distribution according to the intensity ratio distribution. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
-
-
22. A temperature measuring method comprising:
-
receiving radiation from a surface to be measured; filtering the radiation into a plurality of radiation portions respectively having different wavelengths; sensing the radiation portions to respectively obtain a plurality of intensity distributions; calculating an intensity ratio distribution of the radiation between the different wavelengths according to the intensity distributions; and determining a temperature distribution of the surface to be measured according to the intensity ratio distribution. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
-
Specification