MEASURING DEVICE AND METHOD FOR ASCERTAINING A PRESSURE MAP

• US 20160103026A1
• Filed: 06/05/2013
• Published: 04/14/2016
• Est. Priority Date: 06/05/2013
• Status: Active Grant

• Current Assignee: EV Group E Thallner GmbH (Thallner Privatstiftung)
• Original Assignee: EV Group E Thallner GmbH (Thallner Privatstiftung)
• Inventors: POVAZAY, Boris, PEIC, Antun
• Granted Patent: US 10,024,741 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01L 1/24 by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
• CPC Class Codes: G01L 1/241 by photoelastic stress analysis
• CPC Class Codes: G01L 1/242 the material being an optical fibre
• CPC Class Codes: G01L 1/247 using distributed sensing elements, e.g. microcapsules along a single optical fibre G01L1/242
• CPC Class Codes: G01L 1/25 using wave or particle radiation, e.g. X-rays , microwaves, neutrons G01L1/24 takes precedence
• CPC Class Codes: G01L 11/02 by optical means
• CPC Class Codes: G01L 5/0047 measuring forces due to residual stresses
• CPC Class Codes: G01L 9/0076 using photoelectric means
• CPC Class Codes: G01N 2021/1787 Tomographic, i.e. computerised reconstruction from projective measurements
• CPC Class Codes: G01N 2223/419 computed tomograph
• CPC Class Codes: G01N 23/046 using tomography, e.g. computed tomography [CT]
• CPC Class Codes: G06F 2203/04109 FTIR in optical digitiser, i.e. touch detection by frustrating the total internal reflection within an optical waveguide due to changes of optical properties or deformation at the touch location
• CPC Class Codes: G06F 3/0325 using a plurality of light emitters or reflectors or a plurality of detectors forming a reference frame from which to derive the orientation of the object, e.g. by triangulation or on the basis of reference deformation in the picked up image
• CPC Class Codes: G06F 3/041 Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
• CPC Class Codes: G06F 3/042 by opto-electronic means
• CPC Class Codes: G06F 3/0421 by interrupting or reflecting a light beam, e.g. optical touch-screen
• CPC Class Codes: G06F 3/0423 using sweeping light beams, e.g. using rotating or vibrating mirror
• CPC Class Codes: G06F 3/0428 by sensing at the edges of the touch surface the interruption of optical paths, e.g. an illumination plane, parallel to the touch surface which may be virtual sensing beam interruptions in a planar beam grid of an optical touch-screen G06F3/0421
• CPC Class Codes: H01L 22/12 for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions electrical measurement of diffusions H01L22/14

Abstract

A measuring device for determining a pressure map during application of pressure to at least one measurement layer between a first pressure body and a second pressure body the measuring device comprising: (i) at least one transmitter located on one peripheral edge of the measurement layer for emission of signals in the form of electromagnetic waves along a first signal route which runs through the measurement layer and at least one other signal route which runs through the measurement layer, and (ii) at least one receiver located on the peripheral edge for reception of the signals of the first signal route and other signal route(s), which signals are sent by the transmitter through the measurement layer and can be changed when pressure is applied. Furthermore this invention relates to a corresponding method.

Claims

1-8. -8. (canceled)

9. A measuring device for determining a pressure map, the measuring device comprising:

at least one measurement layer including an optical material, wherein an optical property of the optical material is changeable dependent on pressure applied to the at least one measurement layer, the pressure map determined during the application of pressure to the at least one measurement layer while located between a first pressure body and a second pressure body before and/or during a bond process,

at least one transmitter located on a peripheral edge of the measurement layer for emission of signals in the form of electromagnetic waves along a first signal route which runs through the measurement layer and at least one other signal route which runs through the measurement layer,

at least one receiver located on the peripheral edge of the measurement layer for the reception of the signals of the first signal route and the at least one other signal route, said signals sent by the transmitter through the measurement layer and changeable when pressure is applied.

10. The measuring device as claimed in claim 9, wherein the measuring device is used in a wafer processing device.

11. The measuring device as claimed in claim 9, wherein the transmitter and/or the receiver are/is moved along the peripheral edge of the measurement layer.

12. The measuring device as claimed in claim 9, wherein the measuring device includes a plurality of said transmitters distributed on the peripheral edge of the measurement layer.

13. The measuring device as claimed in claim 9, wherein each transmitter emits several signal routes.

14. The measuring device as claimed in claim 9, wherein the measuring device further comprises:

an evaluation unit for determining localized pressure values of the pressure map along the signal routes of the signals received by said at least one receiver.

15. The measuring device as claimed in claim 9, wherein the at least one receiver acquires optical properties of the signal.

17. The measuring device as claimed in claim 9, wherein the measuring device includes a plurality of said receivers distributed on the peripheral edge of the measurement layer, wherein the plurality of said receivers are assigned to one transmitter at a time.

18. The measuring device as claimed in claim 9, wherein the measuring device includes a plurality of said transmitters distributed on the peripheral edge of the measurement layer and a plurality of said receivers distributed on the peripheral edge of the measurement layer, wherein the plurality of said receivers are assigned to one transmitter at a time.

19. The measuring device as claimed in claim 9, wherein the measuring device includes a plurality of said transmitters distributed on the peripheral edge of the measurement layer and a plurality of said receivers distributed on the peripheral edge of the measurement layer, wherein at least two said receivers are assigned to each said transmitter.

20. The measuring device as claimed in claim 9, wherein each said receiver is assigned to one single signal route at a time.

21. The measuring device as claimed in claim 9, wherein each said transmitter emits several signal routes and each said receiver is assigned to one single signal route at a time.

22. The measuring device as claimed in claim 14, wherein said evaluation unit determines the localized pressure values by a transform.

23. The measuring device as claimed in claim 22, wherein said transform is a Radon transform.

24. The measuring device as claimed in claim 15, wherein the optical properties of the signal include one or more of the following properties:

double refraction, index of refraction, mode of signals shaped as transverse electromagnetic waves, transit time, and spectral coding.

16. A method for determining a pressure map for pressure application to a measurement layer including an optical material located between a first pressure body and a second pressure body before and/or during a bond process, wherein an optical property of the optical material is changed dependent on the pressure applied to the measurement layer, the method comprising:

arranging a measuring device between the first pressure body and the second pressure body, wherein the measuring device includes;

the measurement layer including the optical material, wherein the pressure map is determined during the application of pressure to the measurement layer while located between the first pressure body and the second pressure body before and/or during a bond process,

at least one transmitter located on a peripheral edge of the measurement layer for emission of signals in the form of electromagnetic waves along a first signal route which runs through the measurement layer and at least one other signal route which runs through the measurement layer,

at least one receiver located on the peripheral edge of the measurement layer for the reception of the signals of the first signal route and the at least one other signal route, said signals sent by the transmitter through the measurement layer and changeable when pressure is applied,

emitting signals in the form of electromagnetic waves by use of the at least one transmitter located on the peripheral edge of the measurement layer along a first signal route running through the measurement layer and at least one other signal route which runs through the measurement layer,

receiving the signals at the at least one receiver located on the peripheral edge of the measurement layer for receiving the signals of the first signal route and the at least one other signal route, said signals sent by the at least one transmitter through the measurement layer and changeable when pressure is applied.