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METHOD FOR INSPECTING SEALABILITY OF VACUUM CHAMBER

  • US 20160103036A1
  • Filed: 10/10/2014
  • Published: 04/14/2016
  • Est. Priority Date: 09/28/2014
  • Status: Active Grant
First Claim
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1. A method for inspecting sealability of a vacuum chamber, wherein the vacuum chamber has a closed site in which two sealing rings are arranged in such a way that the two sealing rings form therebetween a sealed compartment, the sealed compartment having a wall in which an evacuation hole is formed, the method for inspecting sealability of a vacuum chamber comprising:

  • connecting an evacuation valve through a pipe to the evacuation hole to form evacuation piping;

    mounting a pressure meter to the evacuation piping;

    opening the evacuation valve to proceed with evacuation of the sealed compartment and, during the evacuation process, monitoring the pressure meter; and

    determining sealability of the two sealing rings according to a reading of the pressure meter.

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