THREE-PORT PIEZOELECTRIC ULTRASONIC TRANSDUCER
First Claim
1. A method comprising:
- transmitting, during a first time period, responsive to signals from transceiver circuitry, first ultrasonic signals by way of a first electrode of a piezoelectric micromechanical ultrasonic transducer (PMUT), the PMUT including a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, the first electrode and a second electrode, each of the first electrode and the second electrode being electrically coupled with the transceiver circuitry; and
receiving, during a second time period, second ultrasonic signals by way of the second electrode, whereinthe first time period and the second time period are at least partially overlapping.
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Accused Products
Abstract
A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry. The first electrode may be disposed in a first portion of the diaphragm, and the second electrode may be disposed in a second, separate, portion of the diaphragm. Each of the first and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping.
112 Citations
40 Claims
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1. A method comprising:
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transmitting, during a first time period, responsive to signals from transceiver circuitry, first ultrasonic signals by way of a first electrode of a piezoelectric micromechanical ultrasonic transducer (PMUT), the PMUT including a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, the first electrode and a second electrode, each of the first electrode and the second electrode being electrically coupled with the transceiver circuitry; and receiving, during a second time period, second ultrasonic signals by way of the second electrode, wherein the first time period and the second time period are at least partially overlapping. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An apparatus comprising:
a piezoelectric micromechanical ultrasonic transducer (PMUT), the PMUT including; a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry, wherein; the first electrode is disposed in a first portion of the diaphragm, and the second electrode is disposed in a second portion of the diaphragm, the first portion being separated from the first portion; each of the first electrode and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity; and the PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. An apparatus comprising:
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an array of piezoelectric micromechanical ultrasonic transducer (PMUT) sensors; and an acoustic coupling medium, wherein; at least one PMUT includes a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with a transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry; the first electrode is disposed in a first portion of the diaphragm, and the second electrode is disposed in a second portion of the diaphragm, the first portion being separated from the second portion; each of the first electrode and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity; the PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping; the acoustic coupling medium is disposed above the piezoelectric layer stack; and the PMUT is configured to receive or transmit ultrasonic signals through the acoustic coupling medium. - View Dependent Claims (32, 33, 34, 35, 36)
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37. A non-transitory computer readable medium having software stored thereon, the software including instructions for causing an apparatus to:
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transmit, during a first time period, responsive to signals from transceiver circuitry, first ultrasonic signals by way of a first electrode of a piezoelectric micromechanical ultrasonic transducer (PMUT), the PMUT including a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, the first electrode and a second electrode, each of the first electrode and the second electrode being electrically coupled with the transceiver circuitry; and receive, during a second time period, second ultrasonic signals by way of the second electrode, wherein the first time period and the second time period are at least partially overlapping. - View Dependent Claims (38, 39, 40)
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Specification