METHODOLOGY AND SYSTEM FOR WAFER-LEVEL TESTING OF MEMS PRESSURE SENSORS
First Claim
1. A method for testing a plurality of pressure sensors on a device wafer comprising:
- placing a diaphragm of one of said pressure sensors on said device wafer in proximity to a nozzle of a test system;
applying a pneumatic pressure stimulus to said diaphragm via an outlet of said nozzle; and
measuring a cavity pressure within a cavity associated with said one of said pressure sensors in response to said applying said pneumatic pressure stimulus.
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Accused Products
Abstract
A method for testing a plurality of pressure sensors on a device wafer includes placing a diaphragm of one of the pressure sensors on the device wafer in proximity to a nozzle of a test system. A pneumatic pressure stimulus is applied to the diaphragm via an outlet of the nozzle and a cavity pressure is measured within a cavity associated with the pressure sensor in response to application of the pneumatic pressure stimulus. The pneumatic pressure stimulus within the cavity corresponds to the pressure applied to the diaphragm. Methodology is executed to test the strength and/or stiffness of the diaphragm. Additionally, the methodology and test system can be utilized to determine an individual calibration factor for each pressure sensor on the device wafer.
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Citations
20 Claims
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1. A method for testing a plurality of pressure sensors on a device wafer comprising:
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placing a diaphragm of one of said pressure sensors on said device wafer in proximity to a nozzle of a test system; applying a pneumatic pressure stimulus to said diaphragm via an outlet of said nozzle; and measuring a cavity pressure within a cavity associated with said one of said pressure sensors in response to said applying said pneumatic pressure stimulus. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for testing a plurality of pressure sensors located on a first side of a substrate portion of a device wafer, each of said pressure sensors including a diaphragm and a cavity, said diaphragm being formed in at least one wall surrounding said cavity, and said method comprises:
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retaining said device wafer in a wafer chuck of a test system such that said device wafer is substantially parallel to an X-Y plane of said test system, wherein said device wafer chuck is coupled to a movable X-Y stage; indexing said X-Y stage to place one of said plurality of pressure sensors in proximity to a nozzle of said test system; moving at least one of said nozzle and said device wafer along a Z-axis substantially perpendicular to said X-Y plane to position said diaphragm of said one of said pressure sensors in proximity to said nozzle; sealing a cavity associated with said one of said pressure sensors; applying a pneumatic pressure stimulus from an outlet of said nozzle to said diaphragm via said cavity, said applying occurring following said sealing; and measuring a cavity pressure within said cavity in response to said applying said pneumatic pressure stimulus, said measuring occurring while a port into said cavity remains sealed. - View Dependent Claims (14, 15, 16)
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17. A test system for testing pressure sensors on a device wafer, each of said pressure sensors including a diaphragm, and said test system comprising:
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a table for retaining said device wafer; a nozzle; an actuator for placing said nozzle and said diaphragm of one of said pressure sensors in proximity to one another; a fluid supply line in communication with said nozzle for providing a pneumatic pressure stimulus, said pneumatic pressure stimulus being applied to said diaphragm via an outlet of said nozzle; a pressure transducer for measuring a pressure within said fluid supply line in response to said pneumatic pressure stimulus, said pressure being indicative of a cavity pressure within a cavity associated with said one of said pressure sensors; and a controller configured to receive said pressure and ascertain functionality of said one of said pressure sensors in response to said pressure. - View Dependent Claims (18, 19, 20)
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Specification