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METHODOLOGY AND SYSTEM FOR WAFER-LEVEL TESTING OF MEMS PRESSURE SENSORS

  • US 20160107887A1
  • Filed: 10/15/2014
  • Published: 04/21/2016
  • Est. Priority Date: 10/15/2014
  • Status: Active Grant
First Claim
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1. A method for testing a plurality of pressure sensors on a device wafer comprising:

  • placing a diaphragm of one of said pressure sensors on said device wafer in proximity to a nozzle of a test system;

    applying a pneumatic pressure stimulus to said diaphragm via an outlet of said nozzle; and

    measuring a cavity pressure within a cavity associated with said one of said pressure sensors in response to said applying said pneumatic pressure stimulus.

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