SHAPE MEASURING DEVICE USING FREQUENCY SCANNING INTERFEROMETER
1 Assignment
0 Petitions
Accused Products
Abstract
A shape measuring device includes a light source unit, a light splitting unit, a reference mirror, a light receiving unit and a processing unit. The light source unit generates light and can change the wavelength of the light. The light splitting unit splits the light generated from the light source unit into at least a reference light and a measurement light. The light receiving unit receives the reference light which is reflected by the reference mirror so as to form a reference light path, and the measurement light which is reflected by a light-transmitting target object formed on a substrate so as to form a measurement light path. The processing unit calculates the shape of the measurement argent object based on an interference change resulting from a wavelength change of the light between the reference light and the measurement light received by the light receiving unit.
7 Citations
25 Claims
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1-11. -11. (canceled)
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12. A shape measuring device, comprising:
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a light source unit that generates a light and changes a wavelength of the light; a light splitting unit that splits the light generated from the light source unit into at least a reference light and a measurement light; a reference mirror that reflects the reference light; and a light receiving unit that receives the reference light reflected by the reference mirror so as to form a reference light path and the measurement light reflected by a measurement target object so as to form a measurement light path; wherein the measurement target object is light-transmitting. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A shape measuring device, comprising:
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a light source unit that generates a light and changes a wavelength of the light; a first light path changing unit that enables a first light, which is a portion of the light generated from the light source unit, to have a first light path; a second light path changing unit that enables second light, which is at least a portion of the light generated from the light source unit and is different from the first light, to have a second light path by being reflected by a measurement target object formed on a substrate; and a light receiving unit that receives the first light passing through the first light path and the second light passing through the second light path; wherein the measurement target object is light-transmitting. - View Dependent Claims (25)
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Specification