METHOD OF FORMING AMORPHOUS CARBON MONOLAYER AND ELECTRONIC DEVICE INCLUDING AMORPHOUS CARBON MONOLAYER
First Claim
1. A method of forming an amorphous carbon monolayer (ACM), the method comprising forming the ACM on a surface of a germanium (Ge) substrate via chemical vapor deposition (CVD) process,wherein the CVD process comprises injecting a reaction gas comprising carbon-containing gas and hydrogen (H2) gas into a reaction chamber containing the Ge substrate, andwherein a partial pressure of the H2 gas in the reaction chamber is in the range of from 1 Torr to 30 Torr.
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Abstract
A method of forming an amorphous carbon monolayer (ACM) and an electronic device including the ACM are provided. The method includes forming the ACM on a surface of a germanium (Ge) substrate via a chemical vapor deposition (CVD) process. The CVD process includes injecting a reaction gas including carbon-containing gas and hydrogen (H2) gas in to a reaction chamber containing the Ge substrate, wherein a partial pressure of the H2 gas in the reaction chamber may range from 1 Torr to 30 Torr.
31 Citations
32 Claims
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1. A method of forming an amorphous carbon monolayer (ACM), the method comprising forming the ACM on a surface of a germanium (Ge) substrate via chemical vapor deposition (CVD) process,
wherein the CVD process comprises injecting a reaction gas comprising carbon-containing gas and hydrogen (H2) gas into a reaction chamber containing the Ge substrate, and wherein a partial pressure of the H2 gas in the reaction chamber is in the range of from 1 Torr to 30 Torr.
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10. A transistor device comprising:
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a substrate; an amorphous carbon monolayer (ACM) provided on the substrate; a source electrode and a drain electrode provided on respective sides of the ACM on the substrate; an insulating layer provided on the ACM; and a gate electrode provided on the insulating layer. - View Dependent Claims (11, 12, 13, 14, 15, 31)
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16. A gas sensor comprising:
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first and second electrodes that are spaced apart; and an amorphous carbon monolayer (ACM) that connects the first and second electrodes and is configured to function as a gas adsorption plate for a certain type of gas. - View Dependent Claims (17)
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18. A transparent electrode structure comprising:
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a substrate; at least one amorphous carbon monolayer (ACM) provided on the substrate; and at least one graphene layer provided on the substrate. - View Dependent Claims (19, 20, 21, 32)
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22. A method of improving the electrical conductivity of a structure containing a graphene layer on a substrate, the method comprising either (1) forming at least one amorphous carbon monolayer (ACM) between the substrate and the graphene layer;
- or (2) forming at least one amorphous carbon monolayer (ACM) on the side of the graphene layer furthest from substrate.
- View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30)
Specification