SUBSTRATE THAT IS ELECTRICALLY CONDUCTIVE ON AT LEAST ONE OF THE FACES OF SAME PROVIDED WITH A STACK OF THIN LAYERS FOR GROWING CARBONB NANOTUBES (CNTs)
First Claim
1. A substrate which is electrically conducting on at least one of its faces, provided with a stack of thin layers comprising at least one layer of catalyst material appropriate for accelerating the growth of carbon nanotubes, wherein the stack comprises the sequence of thin layers deposited in the following order above said at least one electrically conducting face of the substrate:
- a/ if appropriate, metal layer made of metal M or layer made of metal alloy based on the metal M or layer made of graphene;
b/ titanium (Ti) layer;
c/ aluminum (Al) layer;
d/ layer of material(s) which are catalysts of the growth of carbon nanotubes.
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Accused Products
Abstract
The invention concerns a substrate that is electrical conductive on at least one of the faces of same, provided with a stack of thin layers comprising at least one layer of catalyst material suitable for accelerating the growth of carbon nanotubes, characterised in that the stack comprises the sequence of thin layers deposited in the following order on top of said at least one electrically conductive face of the substrate: a) optionally, a metal made from metal M or a layer of a metal alloy made from metal M or a graphene layer; b) a titanium layer (Ti); c) an aluminum layer (Al); d) a layer of catalyst material(s) for the growth of carbon nanotubes. The invention also concerns a functional substrate (6) comprising a substrate coated with a carbon nanotube (NTC) mat, a production method and the uses of such a functional substrate.
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Citations
22 Claims
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1. A substrate which is electrically conducting on at least one of its faces, provided with a stack of thin layers comprising at least one layer of catalyst material appropriate for accelerating the growth of carbon nanotubes, wherein the stack comprises the sequence of thin layers deposited in the following order above said at least one electrically conducting face of the substrate:
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a/ if appropriate, metal layer made of metal M or layer made of metal alloy based on the metal M or layer made of graphene; b/ titanium (Ti) layer; c/ aluminum (Al) layer; d/ layer of material(s) which are catalysts of the growth of carbon nanotubes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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12. The substrate as claimed in laim 1, the thickness of the Al layer being between 2 and 10 nm.
Specification