MICROINTEGRATED ENCAPSULATED MEMS SENSOR WITH MECHANICAL DECOUPLING AND MANUFACTURING PROCESS THEREOF
First Claim
1. A microintegrated sensor comprising:
- a stack having a first surface and a second surface, the stack including;
a sensor layer at the first surface, the sensor layer including a peripheral portion surrounding a central portion, the central portion including a platform housing a sensitive element;
a cap layer at the second surface, the cap layer including a peripheral portion and a central portion, the central portion of the cap layer including a plurality of through holes;
an insulating layer located between the peripheral portions of the sensor layer and of the cap layer;
an air gap located between the central portions of the sensor layer and the cap layer; and
a plurality of through trenches in the central portion of the sensor layer, the plurality of through trenches, together, surrounding the platform housing the sensitive element, wherein the plurality of through holes, the air gap and the plurality of through trenches form a fluidic path to the sensitive element.
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Accused Products
Abstract
The microintegrated sensor comprises a stack formed by a sensor layer, of semiconductor material, by a cap layer, of semiconductor material, and by an insulating layer. The sensor layer and the cap layer have a respective peripheral portion surrounding a central portion, and the insulating layer extends between the peripheral portions of the sensor layer and of the cap layer. An air gap extends between the central portions of the sensor layer and of the protection layer. A through trench extends into the central portion of the sensor layer as far as the air gap and surrounds a platform housing a sensitive element. The cap layer has through holes in the insulating layer that extend from the air gap and form a fluidic path with the air gap and the through trench.
22 Citations
26 Claims
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1. A microintegrated sensor comprising:
a stack having a first surface and a second surface, the stack including; a sensor layer at the first surface, the sensor layer including a peripheral portion surrounding a central portion, the central portion including a platform housing a sensitive element; a cap layer at the second surface, the cap layer including a peripheral portion and a central portion, the central portion of the cap layer including a plurality of through holes; an insulating layer located between the peripheral portions of the sensor layer and of the cap layer; an air gap located between the central portions of the sensor layer and the cap layer; and a plurality of through trenches in the central portion of the sensor layer, the plurality of through trenches, together, surrounding the platform housing the sensitive element, wherein the plurality of through holes, the air gap and the plurality of through trenches form a fluidic path to the sensitive element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 25)
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9. A process comprising:
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forming a stack that includes a sensor layer, a cap layer, and an insulating layer; forming a plurality of through holes in a central portion of the cap layer; forming a plurality of through trenches in a central portion in the sensor layer, the through trenches delimiting a platform in the sensor layer, the platform housing a sensitive element; and forming an air gap between the central portions of the sensor layer and the cap layer, wherein the platform is in fluid communication with the plurality of holes in the cap layer through the air gap and the plurality of through trenches. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. An electronic device comprising:
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a microintegrated sensor including; a semiconductor layer including a peripheral portion and a central portion, the central portion including a membrane configured to move in response to a change in pressure, the central portion including a plurality of through trenches that collectively substantially surrounds the membrane and mechanically decouples the membrane from the peripheral portion; a cap layer coupled to the semiconductor layer and including a peripheral portion and a central portion, the cap layer including a plurality of through openings in the central portion of the cap layer; an insulating layer between peripheral portions of the semiconductor layer and the cap layer, the insulating layer forming an air gap between the central portions of the membrane and the cap layer; and a fluid path including the plurality of through openings in the central portion, the air gap, and the plurality of through trenches in the central portion of the semiconductor layer, wherein the fluid path places the membrane in fluid communication with an environment outside of the microintegrated sensor; conductive bumps coupled to the microintegrated sensor; an ASIC coupled to the microintegrated sensor by the conductive bumps; encapsulation material surrounding side surfaces of the ASIC and the microintegrated sensor to form an electronic sensor package; and a microprocessor coupled to the electronic sensor package. - View Dependent Claims (19, 20, 21, 22, 23, 24, 26)
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Specification