SEMICONDUCTOR TESTING FIXTURE AND FABRICATION METHOD THEREOF
First Claim
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1. A semiconductor testing fixture, comprising:
- a substrate having a plurality of testing regions; and
a plurality of testing probes with a predetermined distribution pattern formed on the substrate in each of the plurality of testing regions,wherein each of the plurality of testing probes comprises;
a first testing tip;
an insulation layer formed on a side surface of the first testing tip; and
a second testing tip being coaxial with the first testing tip and surrounding the first testing tip formed on a side surface of the insulation layer.
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Abstract
A semiconductor testing fixture is provided. The semiconductor testing fixture includes a substrate having a plurality of testing regions; and a plurality of testing probes with a predetermined distribution pattern formed on the substrate in each of the plurality of testing regions. Etch of the testing probes comprises a first testing tip; an insulation layer formed on a side surface of the first testing tip; and a second testing tip being coaxial with the first testing tip and surrounding the first testing tip formed on a side surface of the insulation layer.
11 Citations
20 Claims
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1. A semiconductor testing fixture, comprising:
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a substrate having a plurality of testing regions; and a plurality of testing probes with a predetermined distribution pattern formed on the substrate in each of the plurality of testing regions, wherein each of the plurality of testing probes comprises; a first testing tip; an insulation layer formed on a side surface of the first testing tip; and a second testing tip being coaxial with the first testing tip and surrounding the first testing tip formed on a side surface of the insulation layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for fabricating a semiconductor testing fixture, comprising:
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providing a substrate having a plurality of testing regions; and forming a plurality of testing probes with a predetermined distribution pattern on the substrate in each of the testing regions, wherein each of the plurality of testing probes comprises; a first testing tip; an insulation layer formed on a side surface of the first testing tip; and a second testing tip being coaxial with the first testing tip and surrounding the first testing tip formed on a side surface of the insulation layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification