POLARIZER, METHOD FOR MANUFACTURING POLARIZER AND DISPLAY PANEL

• US 20160124265A1
• Filed: 10/05/2015
• Published: 05/05/2016
• Est. Priority Date: 10/30/2014
• Status: Abandoned Application

• Current Assignee: Samsung Display Company Limited (Samsung Group)
• Original Assignee: Samsung Display Company Limited (Samsung Group)
• Inventors: Im, Jun-Mo, Lee, Sang-Wook, Kim, Chang-Ok
• Application Number:
  US14/875,208
• Publication Number:
  US 20160124265A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: C23F 4/00 Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
• CPC Class Codes: C25D 11/022 Anodisation on selected surface areas
• CPC Class Codes: C25D 11/04 of aluminium or alloys based thereon
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles
• CPC Class Codes: G02F 1/133528 Polarisers
• CPC Class Codes: G02F 1/133548 Wire-grid polarisers

Abstract

A polarizer includes a base substrate and a wire grid array disposed on the base substrate. The wire grid array includes a plurality of linear patterns that extend in a first direction and are spaced apart from each other in a second direction crossing the first direction. The linear patterns include a metal layer and a metal oxide layer including an oxide of a metal included in the metal layer.

Claims

1. A polarizer comprising:

a base substrate; and

a wire grid array disposed on the base substrate and including a plurality of linear patterns that extend in a first direction and are spaced apart from each other in a second direction crossing the first direction, the linear patterns comprising a metal layer and a metal oxide layer including an oxide of a metal included in the metal layer.

2. The polarizer of claim 1, wherein the metal layer comprises aluminum.

3. The polarizer of claim 2, wherein the metal oxide layer comprises aluminum oxide (Al₂O₃).

4. The polarizer of claim 1, wherein a width of the linear patterns is between 20 nm and 100 nm.

5. The polarizer of claim 4, wherein a pitch of the linear patterns is between 50 nm and 150 nm.

6. The polarizer of claim 1, further comprising a protective layer configured to cover the wire grid array and comprising at least one material selected from the group consisting of silicon oxide, silicon oxicarbide, and silicon nitride.

7. A method for manufacturing a polarizer, comprising:

disposing a metal layer on a base substrate;

disposing a mask pattern having a wire grid array shape on the metal layer;

oxidizing an exposed upper portion of the metal layer to form a metal oxide pattern;

removing the mask pattern; and

patterning the metal layer by using the metal oxide pattern as a mask to form a wire grid array including a plurality of linear patterns.

8. The method of claim 7, wherein the metal layer comprises aluminum.

9. The method of claim 8, wherein the exposed upper portion of the metal layer is oxidized through an anodizing method.

10. The method of claim 7, wherein the metal layer is patterned through a dry-etching method.

11. The method of claim 7, wherein a width of the linear patterns is between 20 nm and 100 nm.

12. The method of claim 11, wherein a pitch of the linear patterns is between 50 nm and 150 nm.

13. The method of claim 7, further comprising:

disposing a protective layer configured to cover the wire grid array, the protective layer comprising at least one material selected from the group consisting of silicon oxide, silicon oxicarbide, and silicon nitride.

14. A display panel comprising:

a first substrate comprising a first wire grid array comprising a plurality of linear patterns, the linear patterns extending in a first direction and spaced apart from each other in a second direction crossing the first direction, the linear patterns comprising a metal layer and a metal oxide layer including an oxide of a metal included in the metal layer;

a second substrate disposed facing the first substrate; and

a liquid crystal layer disposed between the first substrate and the second substrate.

15. The display panel of claim 14, wherein the metal layer comprises aluminum.

16. The display panel of claim 15, wherein the metal oxide layer comprises aluminum oxide (Al₂O₃).

17. The display panel of claim 14, wherein the first substrate further comprises a thin film transistor disposed in a layer different from the first wire grid array, and a pixel electrode electrically connected to the thin film transistor.

18. The display panel of claim 17, wherein the first substrate further comprises a light-blocking pattern disposed in a same layer as the first wire grid array and including a same material as the linear patterns and having a width greater than the linear pattern.

19. The display panel of claim 18, wherein the light-blocking pattern is configured to overlap with the thin film transistor.

20. The display panel of claim 14, wherein the second substrate comprises a second wire grid array comprising a plurality of linear patterns spaced apart from each other, the linear patterns of the second wire grid array comprising a metal layer and a metal oxide layer including an oxide of a metal included in the metal layer.