S/D CONNECTION TO INDIVIDUAL CHANNEL LAYERS IN A NANOSHEET FET
First Claim
1. A method to form a semiconductor device, the method comprising:
- forming a nanosheet layer/sacrificial layer stack comprising at least one nanosheet layer/sacrificial layer pair, each nanosheet layer/sacrificial layer pair comprising a top surface, a bottom surface, a first end surface and a second end surface, the top surface of the pair being opposite the bottom surface and the first end surface of the pair being opposite the second end surface, the nanosheet layer being on one side of the pair and the sacrificial layer being on an opposing side of the pair, the nanosheet layer comprising a first thickness at the first end surface of the pair, the sacrificial layer comprising a second thickness at the first end surface of the pair, and the first thickness and the second thicknesses both being measured in a direction that is between the top surface and the bottom surface of the pair;
forming a first conductive material layer comprising a first surface and a second surface, the first surface of the first conductive material layer being formed on the first end surface of the each pair of the stack, and the second surface of the first conductive material layer being opposite the first surface of the first conductive material layer; and
forming a source/drain contact on the second surface of the first conductive material layer.
1 Assignment
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Accused Products
Abstract
A field effect transistor (FET) and a method to form the FET are disclosed. The FET comprises a channel region comprising a nanosheet layer/sacrificial layer stack. The stack comprises at least one nanosheet layer/sacrificial layer pair. Each nanosheet layer/sacrificial layer pair comprises an end surface. A conductive material layer is formed on the end surface of the pairs, and a source/drain contact is formed on the conductive material layer. In one embodiment, the sacrificial layer of at least one pair further may comprise a low-k dielectric material proximate to the end surface of the pair. A surface of the low-k dielectric material proximate to the end surface of the pair is in substantial alignment with the end surface of the nanosheet layer. Alternatively, the surface of the low-k dielectric material proximate to the end surface of the pair is recessed with respect to the end surface of the nanosheet layer.
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Citations
20 Claims
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1. A method to form a semiconductor device, the method comprising:
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forming a nanosheet layer/sacrificial layer stack comprising at least one nanosheet layer/sacrificial layer pair, each nanosheet layer/sacrificial layer pair comprising a top surface, a bottom surface, a first end surface and a second end surface, the top surface of the pair being opposite the bottom surface and the first end surface of the pair being opposite the second end surface, the nanosheet layer being on one side of the pair and the sacrificial layer being on an opposing side of the pair, the nanosheet layer comprising a first thickness at the first end surface of the pair, the sacrificial layer comprising a second thickness at the first end surface of the pair, and the first thickness and the second thicknesses both being measured in a direction that is between the top surface and the bottom surface of the pair; forming a first conductive material layer comprising a first surface and a second surface, the first surface of the first conductive material layer being formed on the first end surface of the each pair of the stack, and the second surface of the first conductive material layer being opposite the first surface of the first conductive material layer; and forming a source/drain contact on the second surface of the first conductive material layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A field effect transistor (FET), comprising:
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a channel region comprising a nanosheet layer/sacrificial layer stack, the nanosheet layer/sacrificial layer stack comprising at least one nanosheet layer/sacrificial layer pair, each nanosheet layer/sacrificial layer pair comprising a top surface, a bottom surface, a first end surface and a second end surface, the top surface of the pair being opposite the bottom surface and the first end surface of the pair being opposite the second end surface, the nanosheet layer being on one side of the pair and the sacrificial layer being on an opposing side of the pair, the nanosheet layer comprising a first thickness at the first end surface of the pair, the sacrificial layer comprising a second thickness at the first end surface of the pair, and the first thickness and the second thicknesses both being measured in a direction that is between the top surface and the bottom surface of the pair; a conductive material layer comprising a first surface and a second surface, the first surface of the conductive material layer being formed on the first end surface of each pair of the stack, and the second surface of the conductive material layer being opposite the first surface of the conductive material layer; and a source/drain contact formed on the second surface of the conductive material layer. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A field effect transistor (FET), comprising:
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a first source/drain (S/D) region; a second S/D region; and a channel region disposed between the first S/D region and the second S/D region, the channel region comprising; a plurality of nanosheet layer/sacrificial layer pairs formed on each other, each nanosheet layer/sacrificial layer pair comprising; a top surface, a bottom surface, a first end surface and a second end surface, the top surface being opposite the bottom surface and the first end surface being opposite the second end surface, the nanosheet layer being on one side of the pair and the sacrificial layer being on an opposing side of the pair, the nanosheet layer comprising a first thickness at the first end surface of the pair and a second thickness at the second end surface of the pair, the sacrificial layer comprising a third thickness at the first end surface of the pair and a fourth thickness at the second end surface of the pair, and the first, second, third and fourth thicknesses being measured in a direction that is between the top surface and the bottom surface of the pair, and a first conductive material layer comprising a first surface and a second surface, the first surface of the first conductive material layer being formed on the first end surface of each of the plurality of pairs, and the second surface of the first conductive material layer being opposite the first surface of the first conductive material layer and being coupled to the first source/drain region. - View Dependent Claims (18, 19, 20)
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Specification