MASK FRAME ASSEMBLY, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS

• US 20160126507A1
• Filed: 05/13/2015
• Published: 05/05/2016
• Est. Priority Date: 10/31/2014
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: KO, Junhyeuk, BAEK, Daewon, LEE, Eunji
• Granted Patent: US 9,790,586 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: H10K 50/8445 multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask

Abstract

A mask frame assembly includes a frame, and a mask tensioned on the frame in a first direction, the mask having a deposition pattern portion having a plurality of pattern holes therethrough, a deposition material being deposited on a substrate through the pattern holes, and a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in a second direction as a distance from the deposition pattern portion in the first direction increases, the second direction being oriented along a normal to the mask.

Claims

1. A mask frame assembly, comprising:

a frame; and

a mask tensioned on the frame in a first direction, the mask including;

a deposition pattern portion having a plurality of pattern holes therethrough, a deposition material being deposited on a substrate through the pattern holes, and

a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in a second direction as a distance from the deposition pattern portion in the first direction increases.

2. The mask frame assembly as claimed in claim 1, wherein the dummy portion includes a plurality of step portions from the deposition pattern portion in the first direction.

3. The mask frame assembly as claimed in claim 2, wherein lengths of the plurality of step portions in the first direction decrease as the distance from the deposition pattern portion in the first direction increases.

4. The mask frame assembly as claimed in claim 2, wherein heights of the plurality of step portions in the second direction decrease as the distance from the deposition pattern portion in the first direction increases.

5. The mask frame assembly as claimed in claim 2, wherein the dummy portion further comprises a slope portion between the deposition pattern portion and the plurality of step portions.

6. The mask frame assembly as claimed in claim 1, wherein the dummy portion includes a plurality of concave curved portions from the deposition pattern portion in the first direction.

7. The mask frame assembly as claimed in claim 6, wherein curvature radii of the plurality of curved portions decrease as the distance from the deposition pattern portion in the first direction increases.

8. The mask frame assembly as claimed in claim 6, wherein the dummy portion further comprises a slope portion between the deposition pattern portion and the plurality of curved portions.

9. The mask frame assembly as claimed in claim 1, wherein the dummy portion includes a dummy pattern at one surface of the mask, the dummy pattern having a shape of a hole, a slit, or a groove.

10. A method of manufacturing a mask frame assembly, the method comprising:

preparing a frame;

preparing a mask, the mask including;

a deposition pattern portion having a plurality of pattern holes therethrough, a deposition material being deposited on a substrate through the pattern holes, and

a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in a second direction as a distance from the deposition pattern portion in the first direction increases; and

installing the mask on the frame while tensioning both ends of the mask in the first direction.

11. The method as claimed in claim 10, wherein preparing the mask includes irradiating a laser onto the dummy portion to form a plurality of step portions in the first direction.

12. The method as claimed in claim 11, wherein forming the plurality of step portions in the mask includes decreasing lengths of the plurality of step portions in the first direction as a distance from the deposition pattern portion in the first direction increases.

13. The method as claimed in claim 11, wherein forming the plurality of step portions in the mask includes decreasing heights of the plurality of step portions as a distance from the deposition pattern portion in the first direction increases.

14. The method as claimed in claim 10, wherein preparing the mask includes forming a plurality of curved portions at the dummy portion in the first direction by an etching process.

15. The method as claimed in claim 14, wherein forming the plurality of curved portions includes decreasing radii of the curved portions in the first direction as a distance from the deposition pattern portion in the first direction increases.

16. The method as claimed in claim 10, wherein preparing the mask includes forming a dummy pattern at one surface of the dummy portion, the dummy pattern having a shape of a hole, a slit, or a groove.

17. A method of manufacturing an organic light-emitting display apparatus, the method comprising:

forming a first electrode and a second electrode that are opposite to each other on a substrate;

forming an organic layer between the first electrode and the second electrode,

wherein the organic layer or the second electrode is deposited by using a mask frame assembly including;

a frame, and

a mask tensioned on the frame in a first direction, the mask including;

a deposition pattern portion having a plurality of pattern holes therethrough, a deposition material being deposited on a substrate through the pattern holes, and

a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in a second direction as a distance from the deposition pattern portion in the first direction increases.