Microelectromechanical Systems Fabricated with Roll to Roll Processing
First Claim
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1. A method of manufacturing a microelectromechanical system, the microelectromechanical system comprising a fixed body element and a releasable and moveable feature in association with the fixed body element, the method comprising:
- patterning a first sheet of a flexible plastic material having a metal coating on one surface of the sheet to produce a first metallic region on the one surface;
patterning the first sheet to produce the fixed body element from the first sheet of flexible plastic material and the releasable and moveable feature from the portion of the first sheet having the first metallic region, with the patterning of the releasable and moveable feature leaving the releasable and moveable feature tethered to a portion of the fixed body element; and
laminating a second sheet of a flexible plastic material to the first sheet to provide a composite laminated structure.
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Abstract
Roll to roll processing techniques are described to produce microelectromechanical systems having releasable and moveable mechanical structures. A micro-pump that includes a pump body having compartmentalized pump chambers, with plural inlet and outlet ports and valves and plural membranes enclosing the pump chambers is described as a representative example.
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Citations
14 Claims
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1. A method of manufacturing a microelectromechanical system, the microelectromechanical system comprising a fixed body element and a releasable and moveable feature in association with the fixed body element, the method comprising:
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patterning a first sheet of a flexible plastic material having a metal coating on one surface of the sheet to produce a first metallic region on the one surface; patterning the first sheet to produce the fixed body element from the first sheet of flexible plastic material and the releasable and moveable feature from the portion of the first sheet having the first metallic region, with the patterning of the releasable and moveable feature leaving the releasable and moveable feature tethered to a portion of the fixed body element; and laminating a second sheet of a flexible plastic material to the first sheet to provide a composite laminated structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of manufacturing a microelectromechanical system in a roll to roll processing line, the method comprising:
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unrolling from a first roll a first web of a flexible material having a metal coating on one surface of the sheet; unrolling from a second roll a second web of a flexible material; producing at a first patterning station a body element and a moveable element from the second sheet of material as the sheet traverses through the first patterning station; unrolling from a third roll a third web of a flexible material having a metallic layer on the third sheet; laminating at a laminating station the third web to the second web. - View Dependent Claims (12, 13, 14)
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Specification