MIRCO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE

• US 20160131679A1
• Filed: 11/06/2014
• Published: 05/12/2016
• Est. Priority Date: 11/06/2014
• Status: Active Grant

• Current Assignee: Richtek Technology Corporation (MediaTek, Inc.)
• Original Assignee: Richtek Technology Corporation (MediaTek, Inc.)
• Inventors: Hsu, Yu-Wen, Lin, Shih-Chieh, Wu, Chia-Yu
• Granted Patent: US 9,733,269 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0845 using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different
• CPC Class Codes: H01L 29/84 controllable by variation of applied mechanical force, e.g. of pressure

Abstract

The invention provides a MEMS device. The MEMS device includes: a substrate; a proof mass, including at least two slots, each of the slots including an inner space and an opening, the inner space being relatively closer to a center area of the proof mass than the opening; at least two anchors located in the corresponding slots and connected to the substrate; at least two linkages located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors. The multi-dimensional spring structure includes first and second springs for assisting an out-of-plane movement and an in-plane movement of the proof mass.

Claims

1. A micro-electro-mechanical system (MEMS) device, comprising:

a substrate;

a proof mass, including at least two slots, each of the slots including a first inner space and an opening, wherein the first inner space is relatively closer to a center area of the proof mass than the opening;

at least two anchors, respectively located in the corresponding slots and connected to the substrate;

at least two linkages, respectively located in the corresponding slots and connected to the corresponding anchors; and

a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors, the multi-dimensional spring structure comprising;

a plurality of first springs, connected to the proof mass for assisting an out-of-plane movement of the proof mass; and

a plurality of second springs, each of the second springs being directly or indirectly connected between a corresponding one of the linkages and a corresponding one of the first springs, for assisting an in-plane movement of the proof mass.

2. The MEMS devices of claim 1, wherein the at least two slots, the at least two linkages, and the at least two anchors are respectively symmetrically disposed.

3. The MEMS devices of claim 1, wherein the first springs are connected to two opposite sides of the proof mass, and the openings of the at least two slots are connected to two other opposite sides of the proof mass.

4. The MEMS devices of claim 1, wherein the first springs are rotatable springs for assisting a rotational movement of the proof mass.

5. The MEMS devices of claim 4, wherein a rotation axis is formed along an imaginary line connecting two of the first springs, and a mass of the proof mass is unevenly distributed at two sides of the rotation axis such that the rotational movement is an eccentric movement.

6. The MEMS devices of claim 1, wherein the first springs are translational springs for assisting the out-of-plane movement of the proof mass, and the out-of-plane movement is a translational out-of-plane movement.

7. The MEMS devices of claim 1, wherein more than one of the anchors are located in each of the slots, and the linkage in each of the slots is connected to all the anchors in the same slot.

8. The MEMS devices of claim 1, wherein the multi-dimensional movement is a three-dimensional movement.

9. The MEMS devices of claim 1, wherein the multi-dimensional spring structure has a frame-like structure, and the proof mass is in a second inner space of the frame-like structure.

10. The MEMS devices of claim 1, wherein the multi-dimensional spring structure includes:

an outer frame, including a second inner space for accommodating the proof mass;

at least two inner beams, respectively connected to the at least two corresponding linkages; and

the first springs and the second springs, wherein the outer frame is connected to the inner beams through the second springs, and the outer frame is connected to the proof mass through the first springs, and wherein there is no portion of the proof mass between the inner beams and the outer frame.