TWO-STAGE ADIABATICALLY COUPLED PHOTONIC SYSTEMS

• US 20160131837A1
• Filed: 11/11/2015
• Published: 05/12/2016
• Est. Priority Date: 11/11/2014
• Status: Active Grant

• Current Assignee: II-VI Delaware, Inc. (Coherent Corp.)
• Original Assignee: Finisar Corporation (II-VI Incorporated)
• Inventors: Mahgerefteh, Daniel, Park, Bryan, Chen, Jianxiao, Xu, Xiaojie, Denoyer, Gilles P., Huebner, Bernd
• Granted Patent: US 9,405,066 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G02B 2006/12038 Glass (SiO2 based materials)
• CPC Class Codes: G02B 2006/12061 Silicon
• CPC Class Codes: G02B 2006/12069 Organic material
• CPC Class Codes: G02B 2006/12097 Ridge, rib or the like
• CPC Class Codes: G02B 2006/12121 Laser
• CPC Class Codes: G02B 2006/12123 Diode
• CPC Class Codes: G02B 2006/12147 Coupler
• CPC Class Codes: G02B 2006/12157 Isolator
• CPC Class Codes: G02B 2006/12164 Multiplexing; Demultiplexing
• CPC Class Codes: G02B 6/1221 made from organic materials
• CPC Class Codes: G02B 6/1223 high refractive index type, i.e. high-contrast waveguides
• CPC Class Codes: G02B 6/1228 Tapered waveguides, e.g. integrated spot-size transformers for coupling with fibres G02B6/305
• CPC Class Codes: G02B 6/124 Geodesic lenses or integrated gratings
• CPC Class Codes: G02B 6/125 Bends, branchings or intersections
• CPC Class Codes: G02B 6/126 using polarisation effects G02B6/1226 takes precedence
• CPC Class Codes: G02B 6/136 by etching
• CPC Class Codes: G02B 6/2726 in or on light guides, e.g. polarisation means assembled in a light guide
• CPC Class Codes: G02B 6/274 based on light guide birefringence, e.g. due to coupling between light guides G02B6/105, G02B6/024 take precedence; mechanically induced birefringence G02F1/0134
• CPC Class Codes: G02B 6/2773 Polarisation splitting or combining
• CPC Class Codes: G02B 6/29325 of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only integrated circuit planar waveguide arrangements G02B6/12007; specially adapted for lighting G02B6/0011
• CPC Class Codes: G02B 6/2938 : for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
• CPC Class Codes: G02B 6/305 : and having an integrated mode-size expanding section, e.g. tapered waveguide
• CPC Class Codes: G02B 6/4208 : using non-reciprocal elements or birefringent plates, i.e. quasi-isolators optical isolators per se G02F1/093, G02F1/0955
• CPC Class Codes: G02B 6/4215 : the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers G02B6/4246 takes precedence

Abstract

In an example, a coupled system includes a first waveguide, at least one second waveguide, and an interposer. The first waveguide has a first refractive index n1 and a tapered end. The at least one second waveguide each has a second refractive index n2. The interposer includes a third waveguide having a third refractive index n3 and a coupler portion, where n1>n2>n3. The tapered end of the first waveguide is adiabatically coupled to a coupler portion of one of the at least one second waveguide. A tapered end of one of the at least one second waveguide is adiabatically coupled to the coupler portion of the third waveguide of the interposer. The coupled system is configured to adiabatically couple light between the first waveguide and the at least one second waveguide and between the at least one second waveguide and the third waveguide.

Claims

1. A coupled system comprising;

a first waveguide having a first refractive index n1 and a tapered end;

at least one second waveguide, each having a second refractive index n2;

an interposer comprising a third waveguide having a third refractive index n3 and a coupler portion, wherein;

the tapered end of the first waveguide is adiabatically coupled to a coupler portion of one of the at least one second waveguide;

a tapered end of one of the at least one second waveguide is adiabatically coupled to the coupler portion of the third waveguide of the interposer;

n1>

n2>

n3; and

the coupled system is configured to adiabatically couple light between the first waveguide and the at least one second waveguide and between the at least one second waveguide and the third waveguide.

2. The coupled system of claim 1 wherein:

the first waveguide has a first optical mode size;

each of the at least one second waveguide has a second optical mode size;

the third waveguide of the interposer has a third optical mode size;

the first optical mode size is substantially smaller than the second optical mode size; and

the second optical mode size is substantially smaller than the third optical mode size.

3. The coupled system of claim 2, wherein the third optical mode size of the third waveguide of the interposer is substantially similar to the mode size of a standard single mode optical fiber, thereby providing for efficient optical coupling of light from the first waveguide to single mode optical fiber.

4. The coupled system of claim 1, wherein the first waveguide and at the least one second waveguide are in a silicon (Si) photonic system and fabricated in a same Si photonic integrated circuit process and wherein the third waveguide of the interposer is formed in a different material system and attached separately to the Si photonic integrated circuit.

5. The coupled system of claim 1, wherein the first waveguide comprises a silicon (Si) core and silicon dioxide (SiO₂) cladding such that the first waveguide comprises a Si waveguide and each of the at least one second waveguide comprises a silicon nitride (SiN) core and SiO₂ cladding such that the at least one second waveguide comprises a SiN waveguide.

6. The coupled system of claim 5, wherein the third waveguide of the interposer comprises a polymer.

7. The coupled system of claim 5, wherein the third waveguide of the interposer comprises a high index glass waveguide.

8. The coupled system of claim 1, wherein a value of the first refractive index n1 is in a range of 3 to 3.5 and a value of the second refractive index n2 is in a range of 1.8 to 2.2.

9. The coupled system of claim 8, wherein a value of the third refractive index of the interposer is in a range of 1.49 to 1.6.

10. The coupled system of claim 5, wherein a width of the tapered end of the Si waveguide tapers from a first width in a range from 300-330 nanometer (nm) to a tip width of about 80 nm and wherein a width of the tapered end of the SiN waveguide tapers from a first width in a range from 600 nm to 1000 nm to a tip width in a range from 170 nm to 230 nm.

11. The coupled system of claim 1, further comprising:

the plurality of first waveguides that includes the first waveguide, each having the first refractive index n1, a first end, and a tapered end opposite the first end;

a plurality of second waveguides that includes the at least one second waveguide;

a plurality of third waveguides included in the interposer, each having the third refractive index n3 and a coupler portion, wherein;

the tapered end of each of the plurality of first waveguides is adiabatically coupled to the coupler portion of a corresponding one of the plurality of second waveguides;

the tapered end of each of the plurality of second waveguides is adiabatically coupled to the coupler portion of a corresponding one of the plurality of third waveguides;

the interposer comprises a high index glass waveguide block within which the plurality of third waveguides are formed;

the plurality of third waveguides include a plurality of receive interposer waveguides and a plurality of transmit interposer waveguides;

at an input/output surface of the high index glass waveguide block that is configured to be coupled to an optical fiber end connector, ends of the plurality of receive interposer waveguides and the plurality of transmit interposer waveguides have a double-decker arrangement configured to match an arrangement of receive optical fibers and transmit optical fibers to which the optical fiber end connector is coupled.

12. The coupled system of claim 1, further comprising:

a semiconductor laser;

a first lens positioned in an optical path between the semiconductor laser and an input end of the third waveguide of the interposer;

an optical isolator positioned in the optical path after the first lens; and

a second lens positioned in the optical path after the optical isolator,

wherein the coupled system is configured to adiabatically couple light emitted by the semiconductor laser and received in the third waveguide of the interposer from the third waveguide to the at least one second waveguide and from the at least one second waveguide to the first waveguide.

13. The coupled system of claim 1, wherein:

the coupled system further comprises a plurality of second waveguides that includes the at least one second waveguide, a plurality of second input waveguides and a second output waveguide, each having the second refractive index n2;

a coupler portion of the second output waveguide is adiabatically coupled to the tapered end of the first waveguide;

the coupled system further comprises;

a wavelength division multiplexer (WDM mux) with a plurality of inputs each coupled to a corresponding one of the plurality of second input waveguides and an output coupled to the second output waveguide;

a plurality of third waveguides included in the interposer, each having the third refractive index n3 and a coupler portion, wherein the coupler portion of each of the plurality of third waveguides is adiabatically coupled to a tapered end of a corresponding one of the plurality of second input waveguides;

a plurality of semiconductor lasers;

a plurality of first lenses, each positioned in a corresponding optical path between a corresponding one of the plurality of semiconductor lasers and an input end of a corresponding one of the plurality of third waveguides;

a plurality of optical isolators, each positioned in the corresponding optical path after the corresponding one of the plurality of first lenses; and

a plurality of second lenses, each positioned in the corresponding optical path after the corresponding one of the plurality of optical isolators.

14. The coupled system of claim 1, wherein:

the coupled system further comprises a plurality of second waveguides, each having the second refractive index n2;

a tapered end of a first one of the plurality of second waveguides is adiabatically coupled to the coupler portion of the third waveguide;

the coupled system further comprises;

an arrayed waveguide grating (AWG) with a first input or output coupled to the first one of the plurality of second waveguides and with a plurality of second outputs or inputs each coupled to a corresponding one of others of the plurality of second waveguides; and

a plurality of first waveguides that includes the first waveguide, each having the first refractive index n1 and a tapered end, wherein the tapered end of each of the plurality of first waveguides is adiabatically coupled to a coupler portion of a corresponding one of the others of the plurality of second waveguides.

15. The coupled system of claim 1, wherein the first waveguide and the at least one second waveguide are formed in a silicon (Si) photonic integrated circuit (PIC), the coupled system further comprising a semiconductor chip wafer bonded to the Si PIC, wherein:

the semiconductor chip comprises an active optical device optically coupled to an end of the first waveguide opposite the tapered end of the first waveguide; and

the active optical device comprises an indium phosphide (InP)-based gain element or an InP-based pin detector.

16. The coupled system of claim 1, further comprising a silicon (Si) photonic integrated circuit (PIC), including:

a substrate;

silicon dioxide (SiO₂) box formed above the substrate;

a first layer formed above the SiO₂ box and in which the at least one second waveguide is formed as at least one silicon nitride (SiN) waveguide;

a second layer formed above the SiO₂ box and above or below the first layer and in which the first waveguide is formed as a Si waveguide; and

a plurality of dielectric layers formed above the first layer, wherein;

the Si PIC defines an etched window through the plurality of dielectric layers down to the first layer, wherein the tapered end of the at least one second waveguide is exposed in the etched window;

the etched window is laterally bounded on three sides by the dielectric layers of the Si PIC that are above the first layer;

a top layer included in the dielectric layers of the Si PIC includes a plurality of metal dummies at least in a region of the top layer that bounds the etched window;

17. The coupled system of claim 16, wherein:

the interposer comprises an interposer substrate, an interposer cladding, and an interposer core, the interposer core and the interposer cladding collectively forming the third waveguide;

at least a bottom surface of the interposer core is exposed and free of the interposer cladding along the coupler portion of the third waveguide that is positioned within the etched window above the tapered end of the at least one second waveguide;

the interposer further comprises at least one interposer alignment ridge that extends downward from the interposer cladding and is laterally offset from the third waveguide;

the Si PIC defines at least one anchor window laterally offset from the etched window; and

the at least one interposer alignment ridge is positioned within the at least one anchor window to laterally align the third waveguide with the one of the at least one second waveguide.

18. The coupled system of claim 16, wherein:

the interposer comprises a high index glass waveguide block;

the third waveguide comprises a high index glass waveguide formed in the high index glass waveguide block;

the high index glass waveguide block defines one or more holes or grooves laterally offset from the high index glass waveguide;

the one or more holes or grooves extend vertically upward from a bottom surface of the high index glass waveguide block;

the coupled system further comprises an epoxy underfill positioned within the etched window between at least a portion of the first layer within the etched window and at least a portion of the bottom surface of the high index glass waveguide block;

a thickness of the epoxy underfill between the bottom surface of the high index glass waveguide block and the first layer is less than 1 micrometer; and

each of the one or more holes or grooves is filled with the epoxy underfill.

19. The coupled system of claim 16,

the interposer comprises a high index glass waveguide block;

the third waveguide comprises a high index glass waveguide formed in the high index glass waveguide block;

the high index glass waveguide block defines a v-groove longitudinally adjacent to the high index glass waveguide; and

the v-groove is configured to receive therein at least a portion of an optical fiber and to optically align the optical fiber with the high index glass waveguide.

20. The coupled system of claim 1, wherein the interposer comprises:

a silicon dioxide (SiO₂) substrate;

a silicon oxynitride (SiON) cladding coupled to the SiO₂ substrate; and

a SiON core surrounded on all sides within a first portion of the interposer and having at least one side exposed and free of SiON cladding within a second portion of the interposer, wherein the SiON cladding and the SiON core collectively form the third waveguide.

21. The coupled system of claim 1, wherein the interposer comprises a polymer on glass interposer, including:

a glass substrate;

a polymer cladding coupled to the glass substrate; and

a polymer core surrounded on all sides by the polymer cladding within a first portion of the interposer and having at least one side exposed and free of polymer cladding within a second portion of the interposer, wherein the polymer cladding and the polymer core collectively form the third waveguide.

22. The coupled system of claim 1, further comprising a silicon (Si) photonic integrated circuit (PIC), including:

a substrate;

silicon dioxide (SiO₂) box formed above the substrate;

a first layer formed above the SiO₂ box and in which the at least one second waveguide and a plurality of second waveguides is formed;

a second layer formed above the SiO₂ box and above or below the first layer and in which the first waveguide is formed as a Si waveguide; and

a SiN wavelength division demultiplexer (WDM demux) formed in the first layer, wherein an input of the SiN WDM demux is coupled to one of the plurality of SiN waveguides and each of multiple outputs of the SiN WDM demux is coupled to a corresponding different one of the plurality of SiN waveguides.

23. The coupled system of claim 22, further comprising a Si PIC polarization splitter formed in the Si PIC, wherein the Si PIC polarization splitter includes:

a first SiN waveguide of the plurality of SiN waveguides formed in the first layer of the Si PIC, wherein the first SiN waveguide includes a coupler portion at a first end of the first SiN waveguide;

a second SiN waveguide of the plurality of SiN waveguides formed in the first layer of the Si PIC and spaced apart from the first SiN waveguide, wherein the second SiN waveguide includes a coupler portion at a first end of the second SiN waveguide; and

the Si waveguide formed in the second layer of the Si PIC, wherein;

the tapered end of the first waveguide includes a first tapered end of the Si waveguide and the Si waveguide further includes a second tapered end opposite the first tapered end;

the first tapered end of the Si waveguide is aligned in two orthogonal directions with the coupler portion of the first SiN waveguide such that the first tapered end of the Si waveguide overlaps in the two orthogonal directions and is parallel to the coupler portion of the first SiN waveguide;

the two orthogonal directions correspond to a length direction and a width direction of the first and second SiN waveguides;

the second tapered end of the Si waveguide is aligned in the two orthogonal directions with the coupler portion of the second SiN waveguide such that the second tapered end of the Si waveguide overlaps in the two orthogonal directions and is parallel to the coupler portion of the second SiN waveguide;

each of the first and second tapered ends of the Si waveguide is configured to adiabatically couple most TE polarization of an input beam between a corresponding one of the first and second tapered ends and a corresponding one of the first and second SiN waveguides and to prevent most TM polarization of the input beam from being adiabatically coupled between the corresponding one of the first and second tapered ends and the corresponding one of the first and second SiN waveguides;

the SiN WDM demux comprises a first SiN WDM demux with its input optically coupled to a second end of the first SiN waveguide that is opposite the first end of the first SiN waveguide; and

the coupled system further comprises a second SiN WDM demux formed in the first layer of the Si PIC with a plurality of outputs and an input optically coupled to a second end of the second SiN waveguide that is opposite the first end of the second SiN waveguide.

24. The photonic system of claim 23, further comprising a polarization rotator disposed in an optical path between the second end of the second SiN waveguide and the input of the second SiN WDM demux.