SYSTEMS AND METHOD FOR LASER VOLTAGE IMAGING STATE MAPPING
First Claim
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1. A system for testing an IC device under test (DUT), comprising:
- a laser source generating a laser beam;
optical elements for conditioning and scanning the optical beam onto a selected area of the DUT and for collecting reflected beam from the DUT;
a sensor for converting the reflected beam into an electrical signal;
a data acquisition module configured for extracting phase information from the electrical signal and generating a two-dimensional image from the phase information to thereby provide a phase map of the selected area of the DUT; and
,electrical components for introducing an interference signal into the data acquisition module to be mixed with the electrical signal.
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Abstract
An apparatus and method for laser probing of a DUT is disclosed. The system enables laser voltage imaging state mapping of devices within the DUT. A selected area of the DUT is illuminating a while the DUT is receiving test signals causing certain of the active devices to modulate. Light reflected from the DUT is collected and is converted into an electrical signal. Phase information is extracting from the electrical signal and a two-dimensional image is generated from the phase information, wherein the two-dimensional image spatially correlates to the selected area.
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Citations
20 Claims
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1. A system for testing an IC device under test (DUT), comprising:
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a laser source generating a laser beam; optical elements for conditioning and scanning the optical beam onto a selected area of the DUT and for collecting reflected beam from the DUT; a sensor for converting the reflected beam into an electrical signal; a data acquisition module configured for extracting phase information from the electrical signal and generating a two-dimensional image from the phase information to thereby provide a phase map of the selected area of the DUT; and
,electrical components for introducing an interference signal into the data acquisition module to be mixed with the electrical signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification