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SYSTEMS AND METHOD FOR LASER VOLTAGE IMAGING STATE MAPPING

  • US 20160139200A1
  • Filed: 01/21/2016
  • Published: 05/19/2016
  • Est. Priority Date: 05/01/2009
  • Status: Abandoned Application
First Claim
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1. A system for testing an IC device under test (DUT), comprising:

  • a laser source generating a laser beam;

    optical elements for conditioning and scanning the optical beam onto a selected area of the DUT and for collecting reflected beam from the DUT;

    a sensor for converting the reflected beam into an electrical signal;

    a data acquisition module configured for extracting phase information from the electrical signal and generating a two-dimensional image from the phase information to thereby provide a phase map of the selected area of the DUT; and

    ,electrical components for introducing an interference signal into the data acquisition module to be mixed with the electrical signal.

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