WIRE GRID POLARIZER, DISPLAY DEVICE INCLUDING THE SAME AND METHOD FOR FABRICATING THE SAME
First Claim
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1. A wire grid polarizer, comprising:
- a substrate;
a plurality of parallel conductive wire patterns which is located to protrude on the substrate; and
an oxidation prevention layer which is located along an upper surface of the conductive wire patterns,wherein the oxidation prevention layer is formed of a compound including aluminum and fluorine.
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Abstract
According to an embodiment, there is provided a wire grid polarizer comprising a substrate, a plurality of parallel conductive wire patterns which is located to protrude on the substrate, and an oxidation prevention layer which is located along an upper surface of the conductive wire patterns, wherein the oxidation prevention layer is formed of a compound including aluminum and fluorine.
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Citations
13 Claims
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1. A wire grid polarizer, comprising:
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a substrate; a plurality of parallel conductive wire patterns which is located to protrude on the substrate; and an oxidation prevention layer which is located along an upper surface of the conductive wire patterns, wherein the oxidation prevention layer is formed of a compound including aluminum and fluorine. - View Dependent Claims (2, 3, 4, 5)
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6. A display panel, comprising:
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a substrate; a plurality of conductive wire patterns which is located to protrude on the substrate; an oxidation prevention layer located on the conductive wire patterns; a gate line which is located on the oxidation prevention layer and extends in a first direction; a data line which is insulated from the gate line and extends in a second direction; a thin film transistor which is electrically connected to the gate line and the data line; and a pixel electrode which is electrically connected to the thin film transistor, wherein the oxidation prevention layer is formed of a compound including aluminum and fluorine. - View Dependent Claims (7, 8)
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9. A method of fabricating a wire grid polarizer, comprising:
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forming a conductive wire pattern layer on a substrate; forming a conductive wire pattern by patterning the conductive wire pattern layer; and forming an oxidation prevention layer in-situ after the forming of the conductive wire pattern. - View Dependent Claims (10, 11, 12, 13)
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Specification