×

Spectroscopic Beam Profile Metrology

  • US 20160161245A1
  • Filed: 12/04/2015
  • Published: 06/09/2016
  • Est. Priority Date: 12/05/2014
  • Status: Active Grant
First Claim
Patent Images

1. A metrology system comprising:

  • a multiple wavelength illumination source configured to provide a beam of illumination light having multiple wavelengths and a two-dimensional beam intensity cross-section;

    a beam shaping element configured to reshape the beam of illumination light such that the reshaped beam of illumination light has a beam intensity cross-section that is approximately one dimensional;

    a high numerical aperture (NA) objective configured to receive the reshaped beam of illumination light, illuminate a measurement site on a surface of a specimen with the reshaped beam of illumination light, and collect light from the measurement site in response to the illumination of the measurement site over a range of angles of incidence;

    a first wavelength dispersive element configured to receive the collected light, transmit the collected light according to angle of incidence, and disperse the received collected light according to wavelength; and

    a first two dimensional detector configured to detect the collected light transmitted by the first wavelength dispersive element according to angle of incidence along a first dimension of the first two dimensional detector and detect the collected light dispersed by the wavelength dispersive element according to wavelength along a second dimension of the first two dimensional detector.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×