METHOD OF ACCURATE THICKNESS MEASUREMENT OF BORON CARBIDE COATING ON COPPER FOIL
First Claim
1. A process for measuring the effective thickness of a material coating on substrate comprising the steps of:
- (1) removing a sample of the coated substrate from a larger length coated substrate;
(2) contacting the sample with an etching solution;
(3) allowing the etching solution to dissolve the sample;
(4) diluting the etching solution;
(5) determining the concentration of the material in the in the diluted etching solution; and
(6) calculating the effective thickness of the coating.
2 Assignments
0 Petitions
Accused Products
Abstract
A method is disclosed of measuring the thickness of a thin coating on a substrate comprising dissolving the coating and substrate in a reagent and using the post-dissolution concentration of the coating in the reagent to calculate an effective thickness of the coating. The preferred method includes measuring non-conducting films on flexible and rough substrates, but other kinds of thin films can be measure by matching a reliable film-substrate dissolution technique. One preferred method includes determining the thickness of Boron Carbide films deposited on copper foil. The preferred method uses a standard technique known as inductively coupled plasma optical emission spectroscopy (ICPOES) to measure boron concentration in a liquid sample prepared by dissolving boron carbide films and the Copper substrates, preferably using a chemical etch known as ceric ammonium nitrate (CAN). Measured boron concentration values can then be calculated.
7 Citations
17 Claims
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1. A process for measuring the effective thickness of a material coating on substrate comprising the steps of:
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(1) removing a sample of the coated substrate from a larger length coated substrate; (2) contacting the sample with an etching solution; (3) allowing the etching solution to dissolve the sample; (4) diluting the etching solution; (5) determining the concentration of the material in the in the diluted etching solution; and (6) calculating the effective thickness of the coating. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A process for measuring the effective thickness of a boron carbide coating on copper foil comprising the steps of:
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(1) removing a sample of the boron coated foil from a larger length of foil; (2) contacting the sample with an etching solution; (3) allowing the etching solution to dissolve the sample; (4) diluting the etching solution; (5) determining the concentration of boron carbide in the diluted etching solution; and (6) calculating the effective thickness of the boron coating. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A process for measuring the effective thickness of a boron carbide coating on copper foil comprising the steps of:
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(1) removing a sample of the boron coated foil from a larger length of foil; (2) weighing the sample of boron coated foil; (3) contacting the sample with ceric ammonium nitrate etching solution; (4) allowing the etching solution to dissolve the sample; (5) diluting the etching solution; (6) determining the concentration of boron carbide in the diluted etching solution using inductively coupled plasma optical emission spectroscopy; and (7) calculating the effective thickness of the boron coating.
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Specification