METROLOGY METHOD, COMPUTER PRODUCT AND SYSTEM
First Claim
1. A method comprising:
- determining a type of a structural asymmetry of the target from measured values of the target; and
performing a simulation of optical measurement of the target to determine a value of an asymmetry parameter associated with the asymmetry type.
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Abstract
A method including determining a type of structural asymmetry of the target from measured values of the target, and performing a simulation of optical measurement of the target to determine a value of an asymmetry parameter associated with the asymmetry type. A method including performing a simulation of optical measurement of a target to determine a value of an asymmetry parameter associated with a type of structural asymmetry of the target determined from measured values of the target, and analyzing a sensitivity of the asymmetry parameter to change in a target formation parameter associated with the target. A method including determining a structural asymmetry parameter of a target using a measured parameter of radiation diffracted by the target, and determining a property of a measurement beam of the target based on the structural asymmetry parameter that is least sensitive to change in a target formation parameter associated with the target.
99 Citations
33 Claims
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1. A method comprising:
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determining a type of a structural asymmetry of the target from measured values of the target; and performing a simulation of optical measurement of the target to determine a value of an asymmetry parameter associated with the asymmetry type. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 29, 30, 31, 32, 33)
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15. A method comprising:
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performing a simulation of optical measurement of a target to determine a value of an asymmetry parameter associated with a type of a structural asymmetry of the target determined from measured values of the target; and analyzing a sensitivity of the asymmetry parameter to change in a target formation parameter associated with the target. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method comprising:
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determining a structural asymmetry parameter of a target using a measured parameter of radiation diffracted by the target; and determining a property of a measurement beam of the target based on the structural asymmetry parameter that is least sensitive to change in a target formation parameter associated with the target. - View Dependent Claims (26, 27, 28)
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Specification