SEMICONDUCTOR DEVICE HAVING STRESSOR AND METHOD OF FORMING THE SAME
First Claim
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1. A semiconductor device, comprising:
- a substrate comprising a first trench, a second trench, wherein the trenches are spaced apart from each other, and a channel area is defined between the trenches;
a gate dielectric layer disposed on the channel area;
a gate electrode disposed on the gate dielectric layer; and
a stressor including a plurality of semiconductor layers formed in the first trench and the second trench and a plurality of interlayers formed between the semiconductor layers,wherein sidewalls of the first trench and the second trench are v-shaped.
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Abstract
A semiconductor device having a stressor is provided. A first trench and a second trench spaced apart from each other are formed in a substrate. A channel area is defined between the first trench and the second trench. A gate dielectric layer is formed on the channel area. A gate electrode is formed on the gate dielectric layer. The stressor includes a plurality of semiconductor layers formed in the first trench and the second trench and a plurality of interlayers formed between the semiconductor layers. Sidewalls of the first trench and the second trench are v-shaped (e.g., have a < or > shape).
6 Citations
20 Claims
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1. A semiconductor device, comprising:
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a substrate comprising a first trench, a second trench, wherein the trenches are spaced apart from each other, and a channel area is defined between the trenches; a gate dielectric layer disposed on the channel area; a gate electrode disposed on the gate dielectric layer; and a stressor including a plurality of semiconductor layers formed in the first trench and the second trench and a plurality of interlayers formed between the semiconductor layers, wherein sidewalls of the first trench and the second trench are v-shaped. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A semiconductor device, comprising:
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a substrate comprising a first trench and a second trench, wherein the trenches are spaced apart from each other, and a channel area is defined between the trenches; a gate dielectric layer disposed on the channel area; a gate electrode disposed on the gate dielectric layer; and a stressor including a plurality of semiconductor layers formed in the first trench and the second trench and a plurality of interlayers formed between the semiconductor layers, wherein the interlayers have a different bandgap from the semiconductor layers, and wherein a side of one of the semiconductor layers has a trapezoidal shape. - View Dependent Claims (17, 18)
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19. A semiconductor device, comprising:
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a substrate comprising a first trench and a second trench, wherein the trenches are spaced apart from each other, and a channel area is defined between the trenches; a gate dielectric layer disposed on the channel area; a gate electrode disposed on the gate dielectric layer; and a stressor including a plurality of semiconductor layers formed in the first trench and the second trench and a plurality of interlayers formed between the semiconductor layers, wherein the interlayers have a different bandgap from the semiconductor layers, wherein each sidewall of the stressor includes a pair of edges that form a non-straight angle, and wherein each of the interlayers has a concave shape. - View Dependent Claims (20)
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Specification