MIRCO-ELECTRO-MECHANICAL SYSTEM DEVICE
First Claim
1. An MEMS device, comprising:
- a substrate;
a proof mass, including a first movable electrode and a second movable electrode for sensing movements along first and second directions, wherein the proof mass further includes a hollow space inside;
a spring, a spring anchor, a first electrode anchor, and a second electrode anchor, which are located in the hollow space, wherein the proof mass is connected to the substrate through the spring and the spring anchor; and
a first fixed electrode and a second fixed electrode, respectively connected to the substrate through the first electrode anchor and the second electrode anchor, the first fixed electrode and the first movable electrode forming a first capacitor, and the second fixed electrode and the second movable electrode forming a second capacitor, wherein the first capacitor and the second capacitor are used for sensing a movement of the proof mass;
wherein there is neither any portion of the proof mass nor any portion of any fixing electrode connected between the spring and the spring anchor.
1 Assignment
0 Petitions
Accused Products
Abstract
The invention provides an MEMS device. The MEMS device includes: a substrate, a proof mass, a spring, a spring anchor, a first electrode anchor, and a second electrode anchor, a first fixed electrode and a second fixed electrode. The proof mass is connected to the substrate through the spring and the spring anchor. The proof mass includes a hollow structure inside, and the spring anchor, the first electrode anchor, and the second electrode anchor are located in the hollow structure. The proof mass and the first fixed electrode form a first capacitor, and the proof mass and the second fixed electrode form a second capacitor. There is neither any portion of the proof mass nor any portion of any fixing electrode located between the first electrode anchor, second electrode anchor, and the spring anchor.
20 Citations
11 Claims
-
1. An MEMS device, comprising:
-
a substrate; a proof mass, including a first movable electrode and a second movable electrode for sensing movements along first and second directions, wherein the proof mass further includes a hollow space inside; a spring, a spring anchor, a first electrode anchor, and a second electrode anchor, which are located in the hollow space, wherein the proof mass is connected to the substrate through the spring and the spring anchor; and a first fixed electrode and a second fixed electrode, respectively connected to the substrate through the first electrode anchor and the second electrode anchor, the first fixed electrode and the first movable electrode forming a first capacitor, and the second fixed electrode and the second movable electrode forming a second capacitor, wherein the first capacitor and the second capacitor are used for sensing a movement of the proof mass; wherein there is neither any portion of the proof mass nor any portion of any fixing electrode connected between the spring and the spring anchor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
Specification