FLUID HEATER

• US 20160178235A1
• Filed: 11/30/2015
• Published: 06/23/2016
• Est. Priority Date: 12/22/2014
• Status: Active Grant

• Current Assignee: Horiba STEC, Co., Ltd. (Horiba Limited)
• Original Assignee: Horiba STEC, Co., Ltd. (Horiba Limited)
• Inventors: Taguchi, Akihiro, Hamada, Masashi, Yada, Hidetaka
• Granted Patent: US 10,775,075 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: F24H 1/142 using electric energy supply

Abstract

The present invention is a fluid heater that can easily be reduced in size, that can be manufactured inexpensively, and that provides a stable heating performance. This fluid heater heats a fluid using a heater, and is provided with a heating block in which an internal flow path having an intake port through which the fluid is introduced, and a discharge port through which the fluid is discharged is formed, and in which a heater insertion portion that extends in a predetermined axial direction is formed, wherein the internal flow path has a plurality of main flow path portions that extend in the predetermined axial direction, and one or a plurality of connecting path flow portions that connect the plurality of main flow path portions together.

Claims

1. A fluid heater that heats a fluid using a heater, comprising:

a heating block in which an internal flow path having an intake port through which the fluid is introduced, and a discharge port through which the fluid is discharged is formed by machining, and in which a heater insertion portion that extends in a predetermined axial direction is formed, wherein

the internal flow path has a plurality of main flow path portions that extend in the predetermined axial direction, and one or a plurality of connecting path flow portions that connect the plurality of main flow path portions together, and wherein

the plurality of main flow path portions are provided so as to surround the heater insertion portion.

2. The fluid heater according to claim 1, wherein, as a result of the one or plurality of connecting flow path portions connecting together end portions in a longitudinal direction of the plurality of main flow path portions, the internal flow path is formed as a flow path that turns back on itself a plurality of times between the intake port and the discharge port.

3. The fluid heater according to claim 1, wherein either at least one main flow path portion other than the most upstream side main flow path portion, which is closest to the intake port, and the most downstream side man flow path portion, which is closest to the discharge port, or else the heater insertion portion is positioned between the most upstream side main flow path portion and the most downstream side main flow path portion.

4. The fluid heater according to claim 1, wherein the discharge port is formed above the intake port, and

the internal flow path is formed so as to either extend in a horizontal direction, or so as to slope upwards as it moves towards the downstream side between the intake port and the discharge port.

5. The fluid heater according to claim 1, wherein the heating block has a generally column-shaped configuration, and

one of the main flow path portions opens onto one end surface in the longitudinal direction of the heating block so as to form the intake port, and

another one of the main flow path portions opens onto the same one end surface in the longitudinal direction so as to form the discharge port.

7. A vaporization system comprising:

a vaporizer that vaporizes a liquid material by heating it; and

a preheater that preheats the liquid material that is supplied to the vaporizer, wherein

the preheater is constructed using the fluid heater according to claim 1.

6. A heating block that is used in a fluid heater that heats a fluid using a heater, in which

an internal flow path having an intake port through which the fluid is introduced, and a discharge port through which the fluid is discharged is formed by machining, and in which a heater insertion portion that extends in a predetermined axial direction is formed, and wherein

the internal flow path has a plurality of main flow path portions that extend in the predetermined axial direction, and one or a plurality of connecting path flow portions that connect the plurality of main flow path portions together, and wherein

the plurality of main flow path portions are provided so as to surround the heater insertion portion.