PRESSURE SENSING ELEMENT COMPRISING ELECTRODE INCLUDING PROTRUSION HAVING ELASTICITY
First Claim
1. A pressure sensing element comprising:
- a first electrode including at least one protrusion having elasticity;
a second electrode facing the at least one protrusion; and
a dielectric disposed between the first electrode and the second electrode and including a first dielectric and a second dielectric, whereinthe first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode, andthe second dielectric is disposed between a first portion of the first electrode, the first portion not including the at least one protrusion, and the first dielectric.
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Accused Products
Abstract
A pressure sensing element of an aspect of the present disclosure includes a first electrode including at least one protrusion having elasticity; a second electrode facing the at least one protrusion; and a dielectric disposed between the first electrode and the second electrode and including a first dielectric and a second dielectric. The first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode. The second dielectric is disposed between a first portion of the first electrode, the first portion not including the at least one protrusion, and the first dielectric.
13 Citations
14 Claims
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1. A pressure sensing element comprising:
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a first electrode including at least one protrusion having elasticity; a second electrode facing the at least one protrusion; and a dielectric disposed between the first electrode and the second electrode and including a first dielectric and a second dielectric, wherein the first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode, and the second dielectric is disposed between a first portion of the first electrode, the first portion not including the at least one protrusion, and the first dielectric. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification