Method and Device for Setting the Dynamic Range of a Rotation Rate Sensor
First Claim
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1. A method for setting the dynamic range of a rotation rate sensor, the method comprising:
- exciting a mass of the rotation rate sensor mounted such that the mass is configured to vibrate linearly using a drive signal, the drive signal being provided at a resonant frequency of the mass; and
influencing the vibration using an amplification signal, the amplification signal being provided at a multiple of the resonant frequency in order to set a dynamic range.
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Abstract
A method for setting the dynamic range of a rotation rate sensor includes exciting a mass of the rotation rate sensor mounted such that the mass is configured to vibrate linearly using a drive signal. The drive signal is provided at a resonant frequency of the mass. The method further includes influencing the vibration by using an amplification signal. The amplification signal is provided at a multiple of the resonant frequency in order to set a dynamic range.
6 Citations
13 Claims
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1. A method for setting the dynamic range of a rotation rate sensor, the method comprising:
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exciting a mass of the rotation rate sensor mounted such that the mass is configured to vibrate linearly using a drive signal, the drive signal being provided at a resonant frequency of the mass; and influencing the vibration using an amplification signal, the amplification signal being provided at a multiple of the resonant frequency in order to set a dynamic range. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 13)
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11. A device for setting the dynamic range of a rotation rate sensor, comprising:
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a first module configured to excite a mass of the rotation rate sensor mounted such that the mass is configured to vibrate by using a drive signal, wherein the first module is configured to provide the drive signal at a resonant frequency of the mass; and a second module configured to influence the mass by using an amplification signal, wherein the second module is configured to provide the amplification signal at a multiple of the resonant frequency in order to set the dynamic range.
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12. A rotation rate sensor, comprising:
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at least one mass mounted such that the mass is configured to vibrate, wherein the mass can be excited by electrostatic forces; at least one electrode configured to excite the mass; a first module configured to excite the mass by using a drive signal, wherein first module is configured to provide the drive signal on the electrode at a resonant frequency of the mass; and a second module configured to influence the mass by using an amplification signal, wherein the second module is configured to provide the amplification signal on the electrode at a multiple of the resonant frequency in order to set a dynamic range of the rotation rate sensor.
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Specification