MONOLITHIC Z-AXIS TORSIONAL CMOS MEMS ACCELEROMETER
First Claim
1. A monolithic z-axis torsional CMOS MEMS accelerometer, made of a complementary metal-oxide semiconductor (CMOS) with a micromachining process, and comprising:
- a curl matching frame comprising a first side zone, a second side zone, a third side zone, and a fourth side zone which adjoin successively in an enclosing manner, wherein the first side zone and the third side zone are opposite each other, whereas the second side zone and the fourth side zone are opposite each other, wherein the fourth side zone and the first side zone adjoin each other;
two anchors disposed at the first side zone and the third side zone, respectively;
a first comb structure adjoining the second side zone, a second side zone-adjoining portion of the first side zone, and a second side zone-adjoining portion of the third side zone;
a second comb structure adjoining the fourth side zone, a fourth side zone-adjoining portion of the first side zone, and a fourth side zone-adjoining portion of the third side zone; and
a proof mass disposed between the first comb structure and the second comb structure inside the curl matching frame to adjoin the first comb structure and the second comb structure, wherein an axis of the proof mass is defined by a virtual line which connects the two anchors, and two disconnected regions which are symmetrical to each other but do not adjoin the proof mass are disposed between the axis and the first comb structure.
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Abstract
The present invention discloses a monolithic z-axis torsional CMOS MEMS accelerometer, it includes a curl matching frame, two anchors, a first comb structure, a second comb structure and a proof mass. With the implementation of the present invention, the capacitance sensitivity of Z+ direction and Z− direction sensing signals by the accelerometer can be improved. On the other hand, due to the feasibility of applying micromachining etch processes from the top side, the ease and the yield of production are both promoted.
2 Citations
20 Claims
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1. A monolithic z-axis torsional CMOS MEMS accelerometer, made of a complementary metal-oxide semiconductor (CMOS) with a micromachining process, and comprising:
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a curl matching frame comprising a first side zone, a second side zone, a third side zone, and a fourth side zone which adjoin successively in an enclosing manner, wherein the first side zone and the third side zone are opposite each other, whereas the second side zone and the fourth side zone are opposite each other, wherein the fourth side zone and the first side zone adjoin each other; two anchors disposed at the first side zone and the third side zone, respectively; a first comb structure adjoining the second side zone, a second side zone-adjoining portion of the first side zone, and a second side zone-adjoining portion of the third side zone; a second comb structure adjoining the fourth side zone, a fourth side zone-adjoining portion of the first side zone, and a fourth side zone-adjoining portion of the third side zone; and a proof mass disposed between the first comb structure and the second comb structure inside the curl matching frame to adjoin the first comb structure and the second comb structure, wherein an axis of the proof mass is defined by a virtual line which connects the two anchors, and two disconnected regions which are symmetrical to each other but do not adjoin the proof mass are disposed between the axis and the first comb structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification