ELECTROMETER
First Claim
1. An electrometer comprising:
- a sensing module comprising a plurality of electrostatic sensing elements spaced from each other, and a plurality of second electrodes, wherein the plurality of electrostatic sensing elements and the plurality of second electrodes are alternately arranged in a series connection comprising two ends; and
each of the plurality of electrostatic sensing elements is single walled carbon nanotube or few-walled carbon nanotube; and
a control module coupled to the two ends, wherein the control module is configured to measure a resistance variation Δ
R of the series connection and convert the resistance variation Δ
R into a static electricity potential.
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Accused Products
Abstract
An electrometer includes a sensing module and a control module. The sensing module includes a plurality of electrostatic sensing elements and a plurality of second electrodes. The plurality of electrostatic sensing elements are single walled carbon nanotubes or few-walled carbon nanotubes. The plurality of electrostatic sensing elements and the plurality of second electrodes are alternately arranged in a series connection. The control module is coupled to the two ends of the series connection and configured to measure a resistance variation ΔR of the series connection and convert the resistance variation ΔR into a static electricity potential.
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Citations
20 Claims
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1. An electrometer comprising:
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a sensing module comprising a plurality of electrostatic sensing elements spaced from each other, and a plurality of second electrodes, wherein the plurality of electrostatic sensing elements and the plurality of second electrodes are alternately arranged in a series connection comprising two ends; and
each of the plurality of electrostatic sensing elements is single walled carbon nanotube or few-walled carbon nanotube; anda control module coupled to the two ends, wherein the control module is configured to measure a resistance variation Δ
R of the series connection and convert the resistance variation Δ
R into a static electricity potential. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An electrometer comprising:
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a sensing module comprising a plurality of electrostatic sensing elements spaced from each other and a plurality of second electrodes, the number of the plurality of electrostatic sensing elements is N and the number of the plurality of second electrodes is N−
1, N is an integer greater than 1, wherein the plurality of electrostatic sensing elements and the plurality of second electrodes are alternately arranged in a series connection comprising two ends, and each of the plurality of electrostatic sensing elements is single walled carbon nanotube or few-walled carbon nanotube; anda control module coupled to the two ends, wherein the control module is configured to measure a resistance variation Δ
R of the series connection and convert the resistance variation Δ
R into a static electricity potential. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification