OPTICAL SENSOR, OPTICAL INSPECTION DEVICE, AND OPTICAL PROPERTY DETECTION METHOD
First Claim
1. An optical sensor comprising:
- an irradiation system including at least one light irradiator, the at least one irradiator includinga surface emitting laser array having a plurality of light-emitting units, anda lens disposed in an optical path of the plurality of rays of light emitted from the plurality of light-emitting units to cause light exit directions of at least two of the plurality of light-emitting units to be not parallel to each other, such that the at least one irradiator irradiates a same point of a test object with a plurality of rays of light that are not parallel to each other; and
a detection system configured to detect the plurality of rays of light that are emitted from the irradiation system and propagated inside the test object.
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Accused Products
Abstract
An optical sensor including an irradiation system including at least one light irradiator, the at least one irradiator including a surface emitting laser array having a plurality of light-emitting units, and a lens disposed in an optical path of the plurality of rays of light emitted from the plurality of light-emitting units to cause light exit directions of at least two of the plurality of light-emitting units to be not parallel to each other, such that the at least one irradiator irradiates a same point of a test object with a plurality of rays of light that are not parallel to each other. The optical sensor also including a detection system configured to detect the plurality of rays of light that are emitted from the irradiation system and propagated inside the test object.
6 Citations
15 Claims
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1. An optical sensor comprising:
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an irradiation system including at least one light irradiator, the at least one irradiator including a surface emitting laser array having a plurality of light-emitting units, and a lens disposed in an optical path of the plurality of rays of light emitted from the plurality of light-emitting units to cause light exit directions of at least two of the plurality of light-emitting units to be not parallel to each other, such that the at least one irradiator irradiates a same point of a test object with a plurality of rays of light that are not parallel to each other; and a detection system configured to detect the plurality of rays of light that are emitted from the irradiation system and propagated inside the test object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of detecting an optical property with an optical sensor, the optical sensor including an irradiation system including at least one light irradiator, the at least one irradiator including a surface emitting laser array having a plurality of light-emitting units, and a lens disposed in an optical path of the plurality of rays of light emitted from the plurality of light-emitting units to cause light exit directions of at least two of the plurality of light-emitting units to be not parallel to each other, such that the at least one irradiator irradiates a same point of a test object with a plurality of rays of light that are not parallel to each other, and a detection system configured to detect the plurality of rays of light that are emitted from the irradiation system and propagated inside the test object, the method comprising:
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detecting an optical property of the test object using the optical sensor; calculating a sensitivity distribution of light on the test object; and calculating an optical property of the test object through solving an inverse problem based on the sensitivity distribution.
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Specification