ELECTRONIC DEVICE, METHOD OF MANUFACTURING ELECTRONIC DEVICE, PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS AND MOVING OBJECT

• US 20160195567A1
• Filed: 01/04/2016
• Published: 07/07/2016
• Est. Priority Date: 01/06/2015
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: TANAKA, Satoru
• Granted Patent: US 10,408,856 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

A physical quantity sensor includes a first sensor element, an outer edge portion arranged on at least a portion of the outer periphery of the first sensor element, in which a first groove portion extending in a first direction is provided on the outer edge portion when the outer edge portion is seen in plan view.

Claims

1. An electronic device, comprising:

a first functional element; and

an outer edge portion arranged on at least a portion of the outer periphery of the first functional element,

wherein a first groove portion in which grooves are arranged extending in a first direction or lined up along the first direction is provided on the outer edge portion when the outer edge portion is seen in plan view.

2. The electronic device according to claim 1, further comprising:

a second groove portion in which the grooves are arranged extending in a second direction intersecting the first direction or lined up along the second direction is provided on the outer edge portion when the outer edge portion is seen in plan view.

3. The electronic device according to claim 2,

wherein the first and second groove portions are arranged lined up on at least one side in the outer periphery of the first functional element.

4. The electronic device according to claim 1, further comprising:

a third groove portion in which the grooves are arranged extending or lined up in a direction orthogonal to the central line passing through the center of the first functional element is provided on the outer edge portion when the outer edge portion is seen in plan view.

5. The electronic device according to claim 4,

wherein the outer edge portion is rectangular, and

the third groove portion includes the grooves arranged extending or lined up in a direction orthogonal to the center line that is a diagonal line of the outer edge portion.

6. The electronic device according to claim 1,

wherein the first functional device includes

a fixed portion,

a support unit that extends from the fixed portion, and

a movable portion supported to be displaceable by the support unit.

7. The electronic device according to claim 5, further comprising:

a second functional element,

wherein at least one of the first, second and third groove portions is provided between the first and second functional elements.

12. The electronic device according to claim 1,

wherein the first functional element and the outer edge portion are the same material.

13. The electronic device according to claim 6,

wherein the first direction is the direction in which the movable portion is displaced in plan view of the first functional element.

14. The electronic device according to claim 1,

wherein the shape configured by the first, second, and third groove portions is arranged to as to be rotationally symmetrical when the first functional element is seen in plan view.

15. The electronic device according to claim 1,

wherein at least one of the first, second, and third groove portions penetrates the outer edge portion or the substrate in the thickness direction of the first functional element.

16. The electronic device according to claim 1,

wherein the outer edge portion is a fixed potential.

17. The electronic device according to claim 1,

wherein the groove portion is a groove group that includes a plurality of the grooves.

26. An electronic apparatus comprising:

the electronic device according to claim 1.

27. A moving object comprising:

the electronic device according to claim 1.

8. An electronic device, comprising:

a first functional element;

an outer edge portion arranged on at least a portion of the outer periphery of the first functional element; and

a substrate,

wherein the first functional element is provided on a main surface of the substrate, and

at least one of a first groove portion in which grooves are arranged extending or lined up in a first direction, a second groove portion in which the grooves are arranged extending or lined up in a second direction that intersects the first direction, and a third groove portion in which the grooves are arranged extending or lined up in a direction orthogonal to a center line passing through the center of the first functional element is provided on at least one of the outer edge portion and a region overlapping the outer edge portion when seen in plan view.

9. The electronic device according to claim 8,

wherein the first functional device includes

a fixed portion,

a support unit that extends from the fixed portion, and

a movable portion supported to be displaceable by the support unit.

10. The electronic device according to claim 8,

wherein the fixed portion is fixed on the main surface of the substrate, and

the movable portion is supported to be displaceable while isolated from the substrate by the support unit.

11. The electronic device according to claim 8, further comprising:

a second functional element on the main surface of the substrate,

wherein at least one of the first, second and third groove portions is provided between the first and second functional elements.

18. A method of manufacturing the electronic device, comprising:

forming a recessed portion in the substrate;

bonding a functional element substrate to the substrate while facing the recessed portion; and

performing patterning work on the functional element substrate, and forming a functional element and an outer edge portion, a first groove portion in which grooves are arranged extending or lined up in a first direction and a second groove portion in which the grooves are arranged extending or lined up in a second direction that intersects the first direction in the outer edge portion.

19. A physical quantity sensor, comprising:

a first sensor element; and

an outer edge portion arranged on at least a portion of the outer periphery of the first sensor element,

wherein a first groove portion in which grooves are arranged extending in a first direction or lined up along the first direction is provided on the outer edge portion when the outer edge portion is seen in plan view.

20. The physical quantity sensor according to claim 19, further comprising:

a second groove portion in which the grooves are arranged extending in a second direction intersecting the first direction or lined up along the second direction is provided on the outer edge portion when the outer edge portion is seen in plan view.

21. The physical quantity sensor according to claim 20,

wherein the first and second groove portions are arranged lined up on at least one side in the outer periphery of the first sensor element.

22. The physical quantity sensor according to claim 20, further comprising:

a third groove portion in which the grooves are arranged extending or lined up in a direction orthogonal to the central line passing through the center of the first sensor element is provided on the outer edge portion when the outer edge portion is seen in plan view.

23. The physical quantity sensor according to claim 19,

wherein the groove portion is a groove group that includes a plurality of the grooves.

24. A physical quantity sensor, comprising:

a first sensor element;

an outer edge portion arranged on at least a portion of the outer periphery of the first sensor element, and

a substrate,

wherein the first sensor element is provided on a main surface of the substrate; and

at least one of a first groove portion in which grooves are arranged extending or lined up in a first direction, a second groove portion in which the grooves are arranged extending or lined up in a second direction that intersects the first direction, and a third groove portion in which the grooves are arranged extending or lined up in a direction orthogonal to a center line passing through the center of the first sensor element is provided on at least one of the outer edge portion and a region overlapping the outer edge portion when seen in plan view.

25. The physical quantity sensor according to claim 24, further comprising:

a second sensor element,

wherein at least one of the first, second and third groove portions is provided between the first and second sensor elements.