LAMP DRIVER FOR LOW PRESSURE ENVIRONMENT

• US 20160196992A1
• Filed: 01/04/2016
• Published: 07/07/2016
• Est. Priority Date: 01/05/2015
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: SEREBRYANOV, Oleg V., GOLDIN, Alexander, Ranish, Joseph M.
• Granted Patent: US 10,332,763 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: F27B 17/0025 Especially adapted for treating semiconductor wafers
• CPC Class Codes: H01L 21/67115 mainly by radiation

Abstract

Embodiments of the present disclosure relate to a lamp driver for lamps used as a source of heat radiation in a thermal processing chamber. The lamp driver includes a power source, at least two DC/DC converters, each DC/DC converter connected with the power source in series, a direct connection between the at least two DC/DC converters, and a line that is attached to the direct connection and attachable to a reference voltage. A plurality of the lamp drivers may be utilized to power a plurality of lamps positioned in a grounded lamphead assembly. The electrical potential between the lamps and the grounded lamphead assembly is reduced, which reduces the risk of arcing between the lamps and the lamphead assembly.

Claims

1. A lamp driver, comprising:

a power source;

at least two direct current to direct current converters, each direct current to direct current converter connected with the power source in series; and

a direct connection between the at least two direct current to direct current converters, wherein the direct connection is attachable to a reference voltage.

2. The lamp driver of claim 1, further comprising a rectifier.

3. The lamp driver of claim 2, further comprising a pulse width modulator.

4. The lamp driver of claim 2, further comprising a transformer.

5. The lamp driver of claim 2, wherein the power source is a three phase alternating current power source.

6. The lamp driver of claim 2, wherein the rectifier is a bridge rectifier.

7. The lamp driver of 1, wherein the power source is a three phase alternating current power source.

8. A thermal processing apparatus, comprising:

a plurality of lamps positioned in a lamphead assembly; and

one or more lamp drivers, wherein each lamp driver of the one or more lamp drivers is connected to one or more lamps of the plurality of lamps, and wherein the one or more lamp drivers each includes;

a power source;

at least two direct current to direct current converters, each direct current to direct current converter connected with the power source in series; and

a direct connection between the at least two direct current to direct current converters, wherein the direct connection is attachable to a reference voltage.

9. The thermal processing apparatus of claim 8, wherein each of the one or more lamp drivers further comprises a rectifier.

10. The thermal processing apparatus of claim 9, wherein each of the one or more lamp drivers further comprises a pulse width modulator.

11. The thermal processing apparatus of claim 9, wherein each of the one or more lamp drivers further comprises a transformer.

12. The thermal processing apparatus of claim 9, wherein the power source is a three phase alternating current power source.

13. The thermal processing apparatus of claim 9, wherein the rectifier is a bridge rectifier.

14. The thermal processing apparatus of claim 8, wherein each of the plurality of lamps is a baseless lamp.

15. The thermal processing apparatus of claim 13, wherein the baseless lamps each includes a lead extending from a bulb portion, and a distance between the lead and the lamphead assembly is less than 1 mm.

16. A method for powering a plurality of lamps positioned in a lamphead assembly, comprising:

converting a 480 V alternating current voltage from a power source to a direct current voltage;

reducing the direct current voltage to a reduced direct current voltage using at least two direct current to direct current converters, wherein each direct current to direct current converter is connected with the power source in series, and wherein a direct connection between the at least two direct current to direct current converters is connected to a reference voltage; and

supplying the reduced direct current voltage to one or more lamps of the plurality of lamps, wherein a maximum electrical potential between the plurality of lamps and the lamphead assembly is about 100 V.

17. The method of claim 16, further comprising flowing an inert gas into the lamphead assembly, wherein a pressure inside the lamphead assembly is between about 1×

10−

5 Torr and about 10 Torr.

18. The method of claim 17, wherein the inert gas is helium gas.

19. The method of claim 16, further comprising flowing a coolant through the lamphead assembly.

20. The method of claim 19, wherein the coolant is water.